Patent
   D623673
Priority
Dec 24 2008
Filed
Dec 24 2008
Issued
Sep 14 2010
Expiry
Sep 14 2024
Assg.orig
Entity
unknown
4
12
n/a
The ornamental design for a large area substrate processor, as shown and described.

FIG. 1 is a top plan view of a processing system for processing large area substrates.

FIG. 2 is a front elevation of the processing system of FIG. 1. The back elevation being the same as the front elevation.

FIGS. 3-4 are side views of the processing system of FIG. 1.

FIG. 5 is a bottom view of the processing system of FIG. 1; and,

FIG. 6 is a perspective view of the processing system of FIG. 1.

The present invention generally includes a vacuum processing system for processing large area substrates, such as flat panel displays (i.e., LCD, OLED, and other types of flat panel displays), solar panels, and the like.

The broken lines in the drawings depict unclaimed environmental subject matter.

Miller, John A., Duer, Thomas L.

Patent Priority Assignee Title
11551960, Jan 30 2020 Applied Materials, Inc Helical plug for reduction or prevention of arcing in a substrate support
D831085, Dec 09 2016 HITACHI HIGH-TECH CORPORATION Substrate processing unit
D831086, Dec 09 2016 HITACHI HIGH-TECH CORPORATION Substrate processing unit
D847237, Dec 09 2016 HITACHI HIGH-TECH CORPORATION Substrate processing unit
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Dec 24 2008Applied Materials, Inc.(assignment on the face of the patent)
Mar 05 2009MILLER, JOHN A Applied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0224220122 pdf
Mar 09 2009DUER, THOMAS L Applied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0224220122 pdf
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