Patent
   D640715
Priority
Nov 17 2008
Filed
Nov 17 2008
Issued
Jun 28 2011
Expiry
Jun 28 2025
Assg.orig
Entity
unknown
5
37
n/a
The ornamental design for a lift pin assembly, as shown and described.

FIG. 1 is an isometric view of a lift pin assembly comprising a head and a shaft.

FIG. 2 is a top plan view of the lift pin assembly of FIG. 1.

FIG. 3 is an enlarged partial top plan view of the left end of the lift pin assembly of FIG. 2 illustrating the head and shaft interface.

FIG. 4 is an enlarged partial top plan view of the right end of the lift pin assembly of FIG. 2. The enlarged partial bottom plan view of the right end is identical and is omitted.

FIG. 5 is a side elevation view of the lift pin assembly of FIG. 1. The other side elevation view is identical and is omitted.

FIG. 6 is a bottom plan view of the lift pin assembly of FIG. 1.

FIG. 7 is an enlarged partial bottom plan view of the left end of the lift pin assembly of FIG. 6 illustrating the head and shaft interface.

FIG. 8 is an elevation view of the left end of the lift pin assembly of FIG. 6; and,

FIG. 9 is an elevation view of the right end of the lift pin assembly of FIG. 6.

The broken lines shown in the Figures are disclaimed and do not form part of the claimed design.

Tiner, Robin L.

Patent Priority Assignee Title
11651990, Jul 03 2019 Samsung Electronics Co., Ltd. Substrate processing apparatus and driving method thereof
D774571, Jul 23 2015 SYNERGY MOULDWORKS INC Ejector pin
D980884, Mar 02 2021 Applied Materials, Inc Lift pin
ER6015,
ER6328,
Patent Priority Assignee Title
3015709,
3074186,
3832764,
5594985, May 08 1995 Texas Instruments Incorporated End pin extractor for semiconductor storage tube
5796066, Mar 29 1996 Lam Research Corporation Cable actuated drive assembly for vacuum chamber
5848670, Dec 04 1996 Applied Materials, Inc. Lift pin guidance apparatus
5879128, Jul 24 1996 Applied Materials, Inc. Lift pin and support pin apparatus for a processing chamber
6120609, Oct 25 1996 Applied Materials, Inc Self-aligning lift mechanism
6202368, Jul 02 1999 Earth anchoring system
6364955, Oct 06 1992 Unaxis Balzers Aktiengesellschaft Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method
6481723, Mar 30 2001 Lam Research Corporation Lift pin impact management
6719516, Sep 28 1998 Applied Materials, Inc. Single wafer load lock with internal wafer transport
6767176, Jun 29 2001 Applied Materials, Inc. Lift pin actuating mechanism for semiconductor processing chamber
6884319, Nov 12 2001 Jusung Engineering Co., Ltd. Susceptor of apparatus for manufacturing semiconductor device
6896282, Jan 16 2004 Tow hook replacement hitch
6958098, Feb 28 2000 Applied Materials, Inc. Semiconductor wafer support lift-pin assembly
6962084, Aug 06 2003 Honeywell International Inc. Sensor with molded sensor diaphragm cover
7204888, May 01 2003 Applied Materials, Inc Lift pin assembly for substrate processing
20020011204,
20020121312,
20020174950,
20030075387,
20030136341,
20050180737,
20060156987,
20070007782,
20080110397,
20080149032,
20080196665,
20090095621,
20090127808,
20090155025,
20090190908,
20090314211,
20100013626,
D568914, Sep 10 2002 Applied Materials, Inc. Substrate support lift pin
D612772, Apr 15 2009 Automatic Equipment Manufacturing Company Pin and pin retainer for tow bar
//
Executed onAssignorAssigneeConveyanceFrameReelDoc
Nov 17 2008Applied Materials, Inc.(assignment on the face of the patent)
Feb 17 2009TINER, ROBIN L Applied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0223490760 pdf
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