Patent
   D980884
Priority
Mar 02 2021
Filed
Mar 02 2021
Issued
Mar 14 2023
Expiry
Mar 14 2038
Assg.orig
Entity
unknown
1
38
n/a
The ornamental design for a lift pin, substantially as shown and described.

This application claims priority to U.S. patent application Ser. No. 17/061,015, filed Oct. 1, 2020, the entire disclosure of which is hereby incorporated by reference herein.

FIG. 1 is a top-front isometric view of a lift pin showing my new design;

FIG. 2 is a bottom-front isometric view thereof;

FIG. 3 is a front view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a back view thereof;

FIG. 6 is a left side view thereof;

FIG. 7 is a top view thereof; and,

FIG. 8 is a bottom view thereof.

Hoffmann, Eric J.

Patent Priority Assignee Title
ER1315,
Patent Priority Assignee Title
10192770, Oct 03 2014 Applied Materials, Inc Spring-loaded pins for susceptor assembly and processing methods using same
10262888, Apr 02 2016 Applied Materials, Inc Apparatus and methods for wafer rotation in carousel susceptor
3015709,
4790258, Apr 03 1987 MOTOROLA, INC , A DE CORP Magnetically coupled wafer lift pins
5823153, May 08 1997 Briggs & Stratton Corporation Compressing release with snap-in components
6032691, Mar 29 1999 Kaylynn, Inc. Valve assembly
6148762, Feb 17 1998 ALPS ELECTRIC CO , LTD Plasma processing apparatus
6389677, Mar 30 1999 Lam Research Corporation Perimeter wafer lifting
6550484, Dec 07 2001 Novellus Systems, Inc. Apparatus for maintaining wafer back side and edge exclusion during supercritical fluid processing
6884319, Nov 12 2001 Jusung Engineering Co., Ltd. Susceptor of apparatus for manufacturing semiconductor device
6887317, Sep 10 2002 Applied Materials, Inc Reduced friction lift pin
7160392, Jul 20 2000 Applied Materials, Inc. Method for dechucking a substrate
7180283, Jul 17 2002 Polaris Innovations Limited Wafer lifting device
7187188, Dec 24 2003 Cascade Microtech, INC Chuck with integrated wafer support
7292428, Apr 26 2005 Applied Materials, Inc Electrostatic chuck with smart lift-pin mechanism for a plasma reactor
8230931, Dec 29 2009 Hydril USA Distribution LLC Lifting device and method for lifting a bonnet
20040045509,
20050000453,
20050194100,
20070089672,
20080134814,
20100212832,
20110287631,
20130333616,
20140097175,
20190051555,
20190131167,
CN100440476,
CN101352108,
D504313, Feb 20 2002 Airbus Deutschland GmbH Lockbolt
D568914, Sep 10 2002 Applied Materials, Inc. Substrate support lift pin
D635597, Nov 17 2008 Applied Materials, Inc Lift pin
D640715, Nov 17 2008 Applied Materials, Inc Lift pin assembly
D650818, Dec 19 2008 Applied Materials, Inc Inner lift pin
EP1174910,
JP61214937,
KR20090132335,
WO2010109373,
//
Executed onAssignorAssigneeConveyanceFrameReelDoc
Mar 02 2021Applied Materials, Inc.(assignment on the face of the patent)
Mar 29 2021HOFFMANN, ERIC J Applied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0557550810 pdf
n/a
Date Maintenance Fee Events


n/a
Date Maintenance Schedule