Patent
   D651990
Priority
Jun 01 2010
Filed
Nov 29 2010
Issued
Jan 10 2012
Expiry
Jan 10 2026
Assg.orig
Entity
unknown
0
13
n/a
We claim the ornamental design for a semiconductor manufacturing equipment, as shown and described.

FIG. 1 is a front, top and right side perspective view of an semiconductor manufacturing equipment showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a top plan view thereof;

FIG. 5 is a bottom plan view thereof;

FIG. 6 is a left side elevational view thereof; and,

FIG. 7 is a right side elevational view thereof.

Nagata, Mitsuhiro, Aburatani, Yukinori, Shimada, Masakazu, Nogami, Takashi, Aizawa, Satoshi, Nakashima, Seiyo, Yamada, Tomoyuki, Sugiura, Shinobu

Patent Priority Assignee Title
Patent Priority Assignee Title
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6580087, Oct 15 1999 Sony Corporation Inspection apparatus
6945746, Feb 21 2002 ASM Japan K.K. Semiconductor manufacturing equipment and maintenance method
7039499, Aug 02 2002 SEMINET INC Robotic storage buffer system for substrate carrier pods
7607879, Jun 15 2004 BROOKS AUTOMATION HOLDING, LLC; Brooks Automation US, LLC Substrate processing apparatus with removable component module
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Nov 29 2010HITACHI KOKUSAI ELECTRIC INC.(assignment on the face of the patent)
Jan 07 2011ABURATANI, YUKINORIHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0257370619 pdf
Jan 07 2011NAKASHIMA, SEIYOHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0257370619 pdf
Jan 07 2011SHIMADA, MASAKAZUHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0257370619 pdf
Jan 12 2011SUGIURA, SHINOBUHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0257370619 pdf
Jan 13 2011AIZAWA, SATOSHIHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0257370619 pdf
Jan 13 2011YAMADA, TOMOYUKIHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0257370619 pdf
Jan 14 2011NOGAMI, TAKASHIHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0257370619 pdf
Jan 18 2011NAGATA, MITSUHIROHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0257370619 pdf
Mar 29 2019Hitachi Kokusai Electric IncKOKUSAI ELECTRIC CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0491960764 pdf
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