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						 Patent  
						   D651990  
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						 Priority  
						Jun 01 2010 
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						 Filed 
						Nov 29 2010  
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						 Issued 
						Jan 10 2012 
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						 Expiry 
						Jan 10 2026 
					   
					   						
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			  We claim the ornamental design for a semiconductor manufacturing equipment, as shown and described. 
			  
			 
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FIG. 1 is a front, top and right side perspective view of an semiconductor manufacturing equipment showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a top plan view thereof;
FIG. 5 is a bottom plan view thereof;
FIG. 6 is a left side elevational view thereof; and,
FIG. 7 is a right side elevational view thereof.
	
	Nagata, Mitsuhiro, Aburatani, Yukinori, Shimada, Masakazu, Nogami, Takashi, Aizawa, Satoshi, Nakashima, Seiyo, Yamada, Tomoyuki, Sugiura, Shinobu
	
	
	  
 	  	 | Patent | 
	  	 Priority | 
	  	 Assignee | 
	  	 Title | 
	  
	  
	
	
	
	  
 	  	 | Patent | 
	  	 Priority | 
	  	 Assignee | 
	  	 Title | 
	  
	      
	 | 5810538,  | 
	 May 12 1994 | 
	 Kokusai Electric Co., Ltd. | 
	 Semiconductor manufacturing equipment and method for carrying wafers in said equipment | 
	 
    
	 | 6547660,  | 
	 Jul 02 1999 | 
	 Tokyo Electron Limited; Tadahiro, Ohmi; Taisei Corporation | 
	 Semiconductor manufacturing facility, semiconductor manufacturing apparatus and semiconductor manufacturing method | 
	 
    
	 | 6580087,  | 
	 Oct 15 1999 | 
	 Sony Corporation | 
	 Inspection apparatus | 
	 
    
	 | 6945746,  | 
	 Feb 21 2002 | 
	 ASM Japan K.K. | 
	 Semiconductor manufacturing equipment and maintenance method | 
	 
    
	 | 7039499,  | 
	 Aug 02 2002 | 
	 SEMINET INC  | 
	 Robotic storage buffer system for substrate carrier pods | 
	 
    
	 | 7607879,  | 
	 Jun 15 2004 | 
	 BROOKS AUTOMATION HOLDING, LLC; Brooks Automation US, LLC | 
	 Substrate processing apparatus with removable component module | 
	 
    
	 | 20060120833,  | 
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	 | 20070098527,  | 
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	 | 20080166208,  | 
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	 | 20080317581,  | 
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	 | 20110123300,  | 
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	 | 20110236159,  | 
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	  | 
	 
    
	 | D607424,  | 
	 Mar 30 2006 | 
	 Tokyo Electron Limited | 
	 Wafer carrying-in/out apparatus | 
	 
	
	
	
	
	
	  
	  	 | Date | 
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	  	 | Date | 
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