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Patent
D673923
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Priority
Jan 20 2011
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Filed
Jun 24 2011
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Issued
Jan 08 2013
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Expiry
Jan 08 2027
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Assg.orig
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Entity
unknown
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7
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16
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n/a
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The ornamental design for arm for wafer transportation for manufacturing semiconductor, as shown and described.
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FIG. 1 is front perspective view of an arm for wafer transportation for manufacturing semiconductor illustrating my new design;
FIG. 2 is a top plan view thereof;
FIG. 3 is a bottom view thereof;
FIG. 4 is a front view thereof;
FIG. 5 is a rear view thereof;
FIG. 6 is a left side view thereof; and,
FIG. 7 is a right side view thereof.
The broken lines in the drawings form no part of the claimed design.
Kajiwara, Hideki
Patent |
Priority |
Assignee |
Title |
5643366, |
Jan 31 1994 |
Applied Materials, Inc |
Wafer handling within a vacuum chamber using vacuum |
6167322, |
Jul 10 1998 |
WHITE, DELMAR L |
Intelligent wafer handling system and method |
6168669, |
Feb 24 1998 |
Tokyo Electron Limited |
Substrate holding apparatus and substrate process system |
6183183, |
Jan 16 1997 |
ADVANCED SEMICONDUCTOR MATERIALS AMERICA, INC |
Dual arm linear hand-off wafer transfer assembly |
6216883, |
Jul 24 1998 |
Mitsubishi Denki Kabushiki Kaisha |
Wafer holding hand |
6293749, |
Nov 21 1997 |
ASM America, Inc |
Substrate transfer system for semiconductor processing equipment |
6409453, |
Feb 18 1998 |
Applied Materials, Inc. |
End effector for wafer handler in processing system |
7186297, |
Dec 15 2000 |
Kabushiki Kaisha Yaskawa Denki |
Wafer holding apparatus |
7334826, |
Jul 13 2001 |
Applied Materials Inc |
End-effectors for handling microelectronic wafers |
7611182, |
Feb 25 2005 |
DNS KOREA CO , LTD |
Wafer transfer apparatus |
7654596, |
Jun 27 2003 |
MATTSON TECHNOLOGY, INC; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO , LTD |
Endeffectors for handling semiconductor wafers |
20030169916, |
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20040182417, |
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|
20110146578, |
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D559805, |
Aug 12 2005 |
Tokyo Electron Limited |
Stage arm for a semiconductor wafer delivery apparatus |
D589474, |
Dec 06 2007 |
Tokyo Electron Limited |
Wafer holding member |
Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a