Stage arm for a semiconductor wafer delivery apparatus

Abstract

Description

FIG. 1 is a top plan view of a stage arm for a semiconductor wafer delivery apparatus showing our new design;

FIG. 2 is a front elevation view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a cross-sectional view thereof taken along line 4—4 in FIG. 1;

FIG. 5 is a cross-sectional view thereof taken along line 5—5 in FIG. 1; and,

FIG. 6 is a perspective view thereof in use.

The broken line showing represents unclaimed subject matter.

Claims

The ornamental design for a stage arm for a semiconductor wafer delivery apparatus, as shown and described.