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Patent
D589912
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Priority
Jun 06 2007
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Filed
Dec 06 2007
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Issued
Apr 07 2009
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Expiry
Apr 07 2023
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Assg.orig
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Entity
unknown
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23
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10
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n/a
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The ornamental design for a wafer holding member or the like, as shown and described.
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FIG. 1 is a front elevational view of a wafer holding member or the like, showing our new design;
FIG. 2 is a rear elevational view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a left side elevational view thereof;
FIG. 7 is a top, front and right side perspective view thereof;
FIG. 8 is a bottom, front and left side perspective view thereof; and,
FIG. 9 is a cross-sectional view thereof taken along line 9—9 in FIG. 1.
Nagasaka, Munetoshi, Ogasawara, Ikuo
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Patent |
Priority |
Assignee |
Title |
5643366, |
Jan 31 1994 |
Applied Materials, Inc |
Wafer handling within a vacuum chamber using vacuum |
6183183, |
Jan 16 1997 |
ADVANCED SEMICONDUCTOR MATERIALS AMERICA, INC |
Dual arm linear hand-off wafer transfer assembly |
6190114, |
May 29 1998 |
DAIHEN CORPORATION |
Transfer robot |
6190460, |
Dec 16 1994 |
|
Apparatus for low pressure chemical vapor depostion |
6405610, |
Nov 14 1995 |
Nikon Corporation |
Wafer inspection apparatus |
20010051088, |
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20030169916, |
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20060120833, |
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D559805, |
Aug 12 2005 |
Tokyo Electron Limited |
Stage arm for a semiconductor wafer delivery apparatus |
KR200700498810, |
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Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a