Patent
   D693319
Priority
Dec 22 2011
Filed
Jun 21 2012
Issued
Nov 12 2013
Expiry
Nov 12 2027
Assg.orig
Entity
unknown
0
17
n/a
The ornamental design for a holding pad for transferring a wafer, as shown and described.

FIG. 1 is a front view of a holding pad for transferring a wafer showing my new design.

FIG. 2 is a rear view of the holding pad for transferring a wafer of FIG. 1.

FIG. 3 is a top plan view of the holding pad for transferring a wafer of FIG. 1.

FIG. 4 is a bottom plan view of the holding pad for transferring a wafer of FIG. 1.

FIG. 5 is a right side view of the holding pad for transferring a wafer of FIG. 1.

FIG. 6 is a left side view of the holding pad for transferring a wafer of FIG. 1.

FIG. 7 is a perspective view of the holding pad for transferring a wafer of FIG. 1; and,

FIG. 8 is another front view of the holding pad for transferring a wafer of FIG. 1 shown a used condition.

The features shown in broken lines depict environmental subject matter only and form no part of the claimed design.

The dashed-dot-dashed lines define the boundary lines of the claimed design.

Osada, Hideyuki

Patent Priority Assignee Title
Patent Priority Assignee Title
5310339, Sep 26 1990 Tokyo Electron Limited Heat treatment apparatus having a wafer boat
6095806, Jun 24 1998 Tokyo Electron Limited; Kabushiki Kaisha Toshiba Semiconductor wafer boat and vertical heat treating system
6099302, Jun 23 1998 Samsung Electronics Co., Ltd. Semiconductor wafer boat with reduced wafer contact area
7100954, Jul 11 2003 TEL NEXX, INC Ultra-thin wafer handling system
7644968, Jan 23 2004 Kawasaki Jukogyo Kabushiki Kaisha Substrate holding device
20020092815,
D320361, Jun 02 1989 Tokyo Electron Limited Wafer probe plate holder
D361752, Sep 17 1993 Tokyo Electron Kabushiki Kaisha; Tokyo Electron Tohoku Kabushiki Kaisha Wafer boat or rack for holding semiconductor wafers
D570308, May 01 2006 Tokyo Electron Limited Wafer boat
D589474, Dec 06 2007 Tokyo Electron Limited Wafer holding member
D589912, Jun 06 2007 Tokyo Electron Limited Wafer holding member
D616394, Mar 06 2009 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
D616395, Mar 11 2009 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
D639755, Jan 20 2010 CELADON SYSTEMS, INC Top contact layout board in an electrical system
D639757, Aug 16 2010 CELADON SYSTEMS, INC Top contact layout board in an electrical system
D674366, Jan 20 2011 Tokyo Electron Limited Wafer holding member
D674761, Oct 20 2011 Tokyo Electron Limited Wafer holding member
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Jun 21 2012Tokyo Electron Limited(assignment on the face of the patent)
Jul 03 2012OSADA, HIDEYUKITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0286460576 pdf
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