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Patent
D616395
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Priority
Mar 11 2009
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Filed
Sep 02 2009
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Issued
May 25 2010
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Expiry
May 25 2024
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Assg.orig
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Entity
unknown
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27
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7
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n/a
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The ornamental design for a support of wafer boat for manufacturing semiconductor wafers, as shown and described.
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FIG. 1 is front perspective view of a support of wafer boat for manufacturing semiconductor wafers illustrating my new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is a left side view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof; and,
FIG. 8 is a cross-sectional view taken through line 8—8 of FIG. 2.
Sato, Izumi
Patent |
Priority |
Assignee |
Title |
9816184, |
Mar 20 2012 |
Veeco Instruments INC |
Keyed wafer carrier |
D630657, |
Feb 29 2008 |
NGK Insulators, Ltd. |
Shaft portion of an apparatus for holding and heating semiconductor wafers or the like |
D641030, |
Feb 29 2008 |
NGK Insulators, Ltd. |
Shaft portion of an apparatus for holding and heating semiconductor wafers or the like |
D691974, |
Dec 22 2011 |
Tokyo Electron Limited |
Holding pad for transferring a wafer |
D693319, |
Dec 22 2011 |
Tokyo Electron Limited |
Holding pad for transferring a wafer |
D703161, |
Oct 15 2012 |
Sumitomo Electric Industries, Ltd. |
Wafer holder for ion implantation |
D712852, |
Mar 20 2012 |
Veeco Instruments INC |
Spindle key |
D726133, |
Mar 20 2012 |
Veeco Instruments INC |
Keyed spindle |
D734730, |
Dec 27 2012 |
KOKUSAI ELECTRIC CORPORATION |
Boat of substrate processing apparatus |
D737785, |
Jul 29 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
D738329, |
Jul 29 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
D739831, |
Mar 22 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
D740769, |
Mar 22 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
D744967, |
Mar 20 2012 |
Veeco Instruments INC |
Spindle key |
D747279, |
Jul 29 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
D748591, |
Mar 20 2012 |
Veeco Instruments Inc. |
Keyed spindle |
D761745, |
Jun 28 2013 |
Sumitomo Electric Industries, Ltd. |
Semiconductor device |
D763807, |
May 22 2014 |
HZO, INC |
Boat for a deposition apparatus |
D766850, |
Mar 28 2014 |
Tokyo Electron Limited |
Wafer holder for manufacturing semiconductor |
D769201, |
Nov 20 2014 |
Tokyo Electron Limited |
Wafer boat |
D772183, |
Nov 20 2014 |
Tokyo Electron Limited |
Wafer boat |
D789310, |
Nov 20 2014 |
Tokyo Electron Limited |
Wafer boat |
D791721, |
Nov 20 2014 |
Tokyo Electron Limited |
Wafer boat |
D839219, |
Feb 12 2016 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
D926715, |
Jul 29 2019 |
EPICREW CORPORATION |
Support for a wafer for fabricating a semiconductor |
D935424, |
May 06 2019 |
Lam Research Corporation |
Semiconductor wafer processing tool |
ER6595, |
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Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a