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Patent
D616395
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Priority
Mar 11 2009
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Filed
Sep 02 2009
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Issued
May 25 2010
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Expiry
May 25 2024
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Assg.orig
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Entity
unknown
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27
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7
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n/a
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The ornamental design for a support of wafer boat for manufacturing semiconductor wafers, as shown and described.
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FIG. 1 is front perspective view of a support of wafer boat for manufacturing semiconductor wafers illustrating my new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is a left side view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof; and,
FIG. 8 is a cross-sectional view taken through line 8—8 of FIG. 2.
Sato, Izumi
| Patent |
Priority |
Assignee |
Title |
| 9816184, |
Mar 20 2012 |
Veeco Instruments INC |
Keyed wafer carrier |
| D630657, |
Feb 29 2008 |
NGK Insulators, Ltd. |
Shaft portion of an apparatus for holding and heating semiconductor wafers or the like |
| D641030, |
Feb 29 2008 |
NGK Insulators, Ltd. |
Shaft portion of an apparatus for holding and heating semiconductor wafers or the like |
| D691974, |
Dec 22 2011 |
Tokyo Electron Limited |
Holding pad for transferring a wafer |
| D693319, |
Dec 22 2011 |
Tokyo Electron Limited |
Holding pad for transferring a wafer |
| D703161, |
Oct 15 2012 |
Sumitomo Electric Industries, Ltd. |
Wafer holder for ion implantation |
| D712852, |
Mar 20 2012 |
Veeco Instruments INC |
Spindle key |
| D726133, |
Mar 20 2012 |
Veeco Instruments INC |
Keyed spindle |
| D734730, |
Dec 27 2012 |
KOKUSAI ELECTRIC CORPORATION |
Boat of substrate processing apparatus |
| D737785, |
Jul 29 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
| D738329, |
Jul 29 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
| D739831, |
Mar 22 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
| D740769, |
Mar 22 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
| D744967, |
Mar 20 2012 |
Veeco Instruments INC |
Spindle key |
| D747279, |
Jul 29 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
| D748591, |
Mar 20 2012 |
Veeco Instruments Inc. |
Keyed spindle |
| D761745, |
Jun 28 2013 |
Sumitomo Electric Industries, Ltd. |
Semiconductor device |
| D763807, |
May 22 2014 |
HZO, INC |
Boat for a deposition apparatus |
| D766850, |
Mar 28 2014 |
Tokyo Electron Limited |
Wafer holder for manufacturing semiconductor |
| D769201, |
Nov 20 2014 |
Tokyo Electron Limited |
Wafer boat |
| D772183, |
Nov 20 2014 |
Tokyo Electron Limited |
Wafer boat |
| D789310, |
Nov 20 2014 |
Tokyo Electron Limited |
Wafer boat |
| D791721, |
Nov 20 2014 |
Tokyo Electron Limited |
Wafer boat |
| D839219, |
Feb 12 2016 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
| D926715, |
Jul 29 2019 |
EPICREW CORPORATION |
Support for a wafer for fabricating a semiconductor |
| D935424, |
May 06 2019 |
Lam Research Corporation |
Semiconductor wafer processing tool |
| ER6595, |
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| Date |
Maintenance Fee Events |
n/a
| Date |
Maintenance Schedule |
n/a