Patent
   D616395
Priority
Mar 11 2009
Filed
Sep 02 2009
Issued
May 25 2010
Expiry
May 25 2024
Assg.orig
Entity
unknown
27
7
n/a
The ornamental design for a support of wafer boat for manufacturing semiconductor wafers, as shown and described.

FIG. 1 is front perspective view of a support of wafer boat for manufacturing semiconductor wafers illustrating my new design;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a left side view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view taken through line 88 of FIG. 2.

Sato, Izumi

Patent Priority Assignee Title
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ER6595,
Patent Priority Assignee Title
5897311, May 31 1995 Tokyo Electron Limited Support boat for objects to be processed
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Aug 21 2009SATO, IZUMITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0231810565 pdf
Sep 02 2009Tokyo Electron Limited(assignment on the face of the patent)
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