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Patent
D789310
Priority
Nov 20 2014
Filed
Apr 30 2015
Issued
Jun 13 2017
Expiry
Jun 13 2031
Assg.orig
Entity
unknown
7
38
n/a
The ornamental design for a wafer boat , as shown and described.
FIG. 1 is a front, top plan, and left side perspective view of a wafer boat, showing our new design;
FIG. 2 is an enlarged portion view taken along line 2 -2 in FIG. 1 ;
FIG. 3 is an enlarged portion view taken along line 3 -3 in FIG. 1 ;
FIG. 4 is a front view of FIG. 1 ;
FIG. 5 is an enlarged portion view taken along line 5 -5 in FIG. 4 ;
FIG. 6 is a right side view of FIG. 1 ; the left side view being a mirror image;
FIG. 7 is an enlarged portion view taken along line 7 -7 in FIG. 6 ;
FIG. 8 is a top plan view of FIG. 2 ; and,
FIG. 9 is a bottom plan view of FIG. 2 .
The broken lines shown in the drawings represent portions of the wafer boat that form no part of the claimed design. All sides not shown form no part of the claimed design.
Kusakabe, Yoshinori , Oikawa, Masami
Patent
Priority
Assignee
Title
11929272 ,
Jul 31 2019
KOKUSAI ELECTRIC CORPORATION
Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device
12080522 ,
Apr 22 2020
Applied Materials, Inc
Preclean chamber upper shield with showerhead
D839219 ,
Feb 12 2016
KOKUSAI ELECTRIC CORPORATION
Boat for substrate processing apparatus
D920935 ,
Sep 20 2018
KOKUSAI ELECTRIC CORPORATION
Boat for substrate processing apparatus
D923279 ,
Dec 04 2019
Crash barrel lifting basket
D965542 ,
Mar 19 2020
KOKUSAI ELECTRIC CORPORATION
Boat of substrate processing apparatus
D973609 ,
Apr 22 2020
Applied Materials, Inc
Upper shield with showerhead for a process chamber
Patent
Priority
Assignee
Title
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Date
Maintenance Fee Events
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Date
Maintenance Schedule
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