Wafer boat for use in a semiconductor wafer heat processing apparatus

Abstract

Description

FIG. 1 a perspective view of a wafer boat for use in a semiconductor wafer heat processing apparatus;

FIG. 2 a front elevational view thereof;

FIG. 3 a top plan view thereof;

FIG. 4 a bottom plan view thereof;

FIG. 5 a cross sectional view taken along line V-V in FIG. 2;

FIG. 6 a right side view thereof, the left side view being a mirror image of the right view;

FIG. 7 a rear elevational view thereof; and,

FIG. 8 a cross sectional view taken along line VIII-VIII in FIG. 2.

Claims

The ornamental design for wafer boat for use in a semiconductor wafer heat processing apparatus, as shown and described.