Patent
   D570309
Priority
Oct 25 2006
Filed
Apr 24 2007
Issued
Jun 03 2008
Expiry
Jun 03 2022
Assg.orig
Entity
unknown
20
9
n/a
The ornamental design for a wafer boat, as shown and described.

FIG. 1 is a perspective view of the design for a wafer boat in accordance with the invention;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a left side view thereof;

FIG. 6 is a top view thereof;

FIG. 7 is a bottom view thereof;

FIG. 8 is a sectional view thereof along line 88 of FIG. 6; and,

FIG. 9 is a sectional view thereof along line 99 of FIG. 2.

In the drawings, the left-hand side of each figure is regarded as the top of the figure.

Sato, Izumi, Kaneko, Hirofumi

Patent Priority Assignee Title
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Patent Priority Assignee Title
5752609, Feb 06 1996 Tokyo Electron Limited Wafer boat
6056123, Dec 10 1997 Novus Corporation Semiconductor wafer carrier having the same composition as the wafers
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D411176, Aug 20 1997 TOKYO ELECTRON LLIMITED Wafer boat for use in a semiconductor wafer heat processing apparatus
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Apr 24 2007Tokyo Electron Limited(assignment on the face of the patent)
Jun 21 2007SATO, IZUMITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0196310992 pdf
Jun 21 2007KANEKO, HIROFUMITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0196310992 pdf
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