PTO
Wrapper
PDF
|
Dossier
Espace
Google
|
|
Patent
D570309
|
Priority
Oct 25 2006
|
Filed
Apr 24 2007
|
Issued
Jun 03 2008
|
Expiry
Jun 03 2022
|
|
Assg.orig
|
|
Entity
unknown
|
22
|
9
|
n/a
|
|
|
The ornamental design for a wafer boat, as shown and described.
|
FIG. 1 is a perspective view of the design for a wafer boat in accordance with the invention;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is a left side view thereof;
FIG. 6 is a top view thereof;
FIG. 7 is a bottom view thereof;
FIG. 8 is a sectional view thereof along line 8—8 of FIG. 6; and,
FIG. 9 is a sectional view thereof along line 9—9 of FIG. 2.
In the drawings, the left-hand side of each figure is regarded as the top of the figure.
Sato, Izumi, Kaneko, Hirofumi
Patent |
Priority |
Assignee |
Title |
D601979, |
Mar 28 2008 |
Tokyo Electron Limited |
Pedestal base of a heat insulating cylinder for manufacturing semiconductor wafers |
D655255, |
Jun 18 2010 |
KOKUSAI ELECTRIC CORPORATION |
Boat of wafer processing apparatus |
D655682, |
Jun 18 2010 |
KOKUSAI ELECTRIC CORPORATION |
Boat of wafer processing apparatus |
D734730, |
Dec 27 2012 |
KOKUSAI ELECTRIC CORPORATION |
Boat of substrate processing apparatus |
D737785, |
Jul 29 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
D738329, |
Jul 29 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
D739831, |
Mar 22 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
D740769, |
Mar 22 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
D747279, |
Jul 29 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
D769201, |
Nov 20 2014 |
Tokyo Electron Limited |
Wafer boat |
D772183, |
Nov 20 2014 |
Tokyo Electron Limited |
Wafer boat |
D789310, |
Nov 20 2014 |
Tokyo Electron Limited |
Wafer boat |
D791721, |
Nov 20 2014 |
Tokyo Electron Limited |
Wafer boat |
D839219, |
Feb 12 2016 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
D846514, |
May 03 2018 |
KOKUSAI ELECTRIC CORPORATION |
Boat of substrate processing apparatus |
D847105, |
May 03 2018 |
KOKUSAI ELECTRIC CORPORATION |
Boat of substrate processing apparatus |
D893438, |
Aug 21 2017 |
Tokyo Electron Limited |
Wafer boat |
D908102, |
Feb 20 2019 |
Veeco Instruments INC |
Transportable semiconductor wafer rack |
D908103, |
Feb 20 2019 |
Veeco Instruments INC |
Transportable semiconductor wafer rack |
D939459, |
Aug 07 2019 |
KOKUSAI ELECTRIC CORPORATION |
Boat for wafer processing apparatus |
ER4192, |
|
|
|
ER6595, |
|
|
|
Patent |
Priority |
Assignee |
Title |
5752609, |
Feb 06 1996 |
Tokyo Electron Limited |
Wafer boat |
6056123, |
Dec 10 1997 |
Novus Corporation |
Semiconductor wafer carrier having the same composition as the wafers |
6065615, |
Feb 28 1996 |
Asahi Glass Company, Ltd. |
Vertical wafer boat |
6110285, |
Apr 15 1997 |
COORSTEK KK |
Vertical wafer boat |
20020130061, |
|
|
|
D378675, |
May 30 1995 |
Tokyo Electron Limited |
Wafer boat |
D404015, |
Jan 31 1997 |
Tokyo Electron Limited |
Wafer boat for use in a semiconductor wafer heat processing apparatus |
D409158, |
Aug 20 1997 |
Tokyo Electron Limited |
Wafer boat for use in a semiconductor wafer heat processing apparatus |
D411176, |
Aug 20 1997 |
TOKYO ELECTRON LLIMITED |
Wafer boat for use in a semiconductor wafer heat processing apparatus |
Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a