Patent
   D908103
Priority
Feb 20 2019
Filed
Feb 20 2019
Issued
Jan 19 2021
Expiry
Jan 19 2036
Assg.orig
Entity
unknown
1
42
n/a
The ornamental design for a transportable semiconductor wafer rack, as shown and described.

FIG. 1 is a perspective view of a transportable semiconductor wafer rack showing our new design;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a first side view thereof;

FIG. 5 is a second side view thereof;

FIG. 6 is a top view thereof;

FIG. 7 is a bottom view thereof;

FIG. 8 is a cross-section view taken along line 8-8 of FIG. 7; and,

FIG. 9 is another cross-section view taken along line 9-9 of FIG. 7.

The broken lines in the Figures are for the purpose of illustrating unclaimed portions of the transportable semiconductor wafer rack and form no part of the claimed design. The shade lines in the Figures show contour and not surface ornamentation.

Lecordier, Laurent, Sershen, Michael J., Pacier, Michael W., Bertuch, Adam F.

Patent Priority Assignee Title
11929272, Jul 31 2019 KOKUSAI ELECTRIC CORPORATION Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device
Patent Priority Assignee Title
10224185, Sep 01 2014 Samsung Electronics Co., Ltd. Substrate processing apparatus
5752609, Feb 06 1996 Tokyo Electron Limited Wafer boat
6062853, Feb 29 1996 Tokyo Electron Limited Heat-treating boat for semiconductor wafers
6065615, Feb 28 1996 Asahi Glass Company Ltd Vertical wafer boat
6099302, Jun 23 1998 Samsung Electronics Co., Ltd. Semiconductor wafer boat with reduced wafer contact area
6099645, Jul 09 1999 POCO GRAPHITE FINANCE, LLC; POCO GRAPHITE, INC Vertical semiconductor wafer carrier with slats
6287112, Mar 30 2000 ASM INTERNATIONAL N V Wafer boat
6341935, Jun 14 2000 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
7484958, Jul 16 2003 SHIN-ETSU HANDOTAI CO , LTD Vertical boat for heat treatment and method for producing the same
7857140, Dec 06 2005 SOCIONEXT INC Semiconductor wafer storage case and semiconductor wafer storing method
20020092815,
20020113027,
20020130061,
20020187023,
20030024888,
20050145584,
20180019144,
20190279891,
CN110246791,
D361752, Sep 17 1993 Tokyo Electron Kabushiki Kaisha; Tokyo Electron Tohoku Kabushiki Kaisha Wafer boat or rack for holding semiconductor wafers
D366868, Sep 29 1993 Tokyo Electron Kabushiki Kaisha; Tokyo Electron Toboku Kabushiki Kaisha Wafer boat or rack
D378675, May 30 1995 Tokyo Electron Limited Wafer boat
D378823, May 30 1995 Tokyo Electron Tohoku Limited Wafer boat
D380454, May 30 1995 Tokyo Electron Limited Wafer boat
D404015, Jan 31 1997 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
D404371, Aug 20 1997 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
D409158, Aug 20 1997 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
D411176, Aug 20 1997 TOKYO ELECTRON LLIMITED Wafer boat for use in a semiconductor wafer heat processing apparatus
D570308, May 01 2006 Tokyo Electron Limited Wafer boat
D570309, Oct 25 2006 Tokyo Electron Limited Wafer boat
D580894, May 01 2006 Tokyo Electron Limited Wafer boat
D600221, Mar 28 2008 Tokyo Electron Limited Wafer boat
D600222, Mar 28 2008 Tokyo Electron Limited Wafer boat
D616396, Mar 12 2009 Tokyo Electron Limited Pedestal of heat insulating cylinder for manufacturing semiconductor wafers
D655255, Jun 18 2010 KOKUSAI ELECTRIC CORPORATION Boat of wafer processing apparatus
D655682, Jun 18 2010 KOKUSAI ELECTRIC CORPORATION Boat of wafer processing apparatus
D734730, Dec 27 2012 KOKUSAI ELECTRIC CORPORATION Boat of substrate processing apparatus
D737785, Jul 29 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D738329, Jul 29 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D747279, Jul 29 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D839219, Feb 12 2016 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D846514, May 03 2018 KOKUSAI ELECTRIC CORPORATION Boat of substrate processing apparatus
//////
Executed onAssignorAssigneeConveyanceFrameReelDoc
Feb 20 2019Veeco Instruments Inc.(assignment on the face of the patent)
Feb 22 2019PACIER, MICHAEL WVeeco Instruments INCASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0485070236 pdf
Feb 22 2019SERSHEN, MICHAEL J Veeco Instruments INCASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0485070236 pdf
Feb 27 2019BERTUCH, ADAM FVeeco Instruments INCASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0485070236 pdf
Feb 28 2019LECORDIER, LAURENTVeeco Instruments INCASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0485070236 pdf
Dec 16 2021Veeco Instruments INCHSBC BANK USA, NATIONAL ASSOCIATION, AS COLLATERAL AGENTPATENT SECURITY AGREEMENT0585330321 pdf
n/a
Date Maintenance Fee Events


n/a
Date Maintenance Schedule