Boat of wafer processing apparatus

Abstract

Description

FIG. 1 is a perspective view 1 of a boat of the wafer processing apparatus;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is an enlarged cross-sectional view thereof taken along lines 8-8 in FIG. 2;

FIG. 9 is a cross-sectional view thereof taken along lines 9-9 in FIG. 8; and,

FIG. 10 is a perspective view of the cross-section from FIG. 9.

The broken line showing of the boat of a wafer processing apparatus is for the purpose of illustrating environmental structure and forms no part of the claimed design.

Claims

The ornamental design for a boat of a wafer processing apparatus, as shown and described.