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Patent
D908102
Priority
Feb 20 2019
Filed
Feb 20 2019
Issued
Jan 19 2021
Expiry
Jan 19 2036
Assg.orig
Entity
unknown
1
42
n/a
The ornamental design for a transportable semiconductor wafer rack , as shown and described.
FIG. 1 is a perspective view of a transportable semiconductor wafer rack showing our new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a first side view thereof;
FIG. 5 is a second side view thereof;
FIG. 6 is a top view thereof;
FIG. 7 is a bottom view thereof;
FIG. 8 is a cross-section view taken along line 8 -8 of FIG. 7 ; and,
FIG. 9 . is another cross-section view taken along line 9 -9 of FIG. 7 .
The broken lines in the Figures are for the purpose of illustrating unclaimed portions of the transportable semiconductor wafer rack and form no part of the claimed design. The shade lines in the Figures show contour and not surface ornamentation.
Lecordier, Laurent , Sershen, Michael J. , Pacier, Michael W. , Bertuch, Adam F.
Patent
Priority
Assignee
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KOKUSAI ELECTRIC CORPORATION
Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device
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Date
Maintenance Fee Events
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Date
Maintenance Schedule
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