Patent
   D378675
Priority
May 30 1995
Filed
Nov 30 1995
Issued
Apr 01 1997
Expiry
Apr 01 2011
Assg.orig
Entity
unknown
19
3
n/a
The ornamental design for wafer boat, as shown and described.

FIG. 1 is a front view of a first embodiment of a wafer boat showing my new design;

FIG. 2 is a rear view of the embodiment of FIG. 1;

FIG. 3 is a top view of the embodiment of FIG. 1;

FIG. 4 is a bottom view of the embodiment of FIG. 1;

FIG. 5 is a left side view of the embodiment of FIG. 1, the right side view being a mirror image and, therefore, not shown;

FIG. 6 is a cross sectional view of the embodiment of FIG. 1 on section line 6--6 in FIG. 1;

FIG. 7 is a cross sectional view of the embodiment of FIG. 1 on section line 7--7 in FIG. 3;

FIG. 8 is a front/top/right side perspective view of the embodiment of FIG. 1;

FIG. 9 is a front view of a second embodiment of a wafer boat showing my new design;

FIG. 10 is a rear view of the embodiment of FIG. 9;

FIG. 11 is a top view of the embodiment of FIG. 9;

FIG. 12 is a bottom view of the embodiment of FIG. 9;

FIG. 13 is a left side view of the embodiment of FIG. 9, the right side view being a mirror image and, therefore, not shown;

FIG. 14 is a cross sectional view of the embodiment of FIG. 9 on section line 14--14 in FIG. 9;

FIG. 15 is a cross sectional view of the embodiment of FIG. 9 on section line 15--15 in FIG. 11; and,

FIG. 16 is a front/top/right side perspective view of the embodiment of FIG. 9.

Iwai, Hiroyuki

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Patent Priority Assignee Title
5482559, Oct 21 1993 Tokyo Electron Limited Heat treatment boat
5510146, Jul 16 1991 Seiko Epson Corporation CVD apparatus, method of forming semiconductor film, and method of fabricating thin-film semiconductor device
D366868, Sep 29 1993 Tokyo Electron Kabushiki Kaisha; Tokyo Electron Toboku Kabushiki Kaisha Wafer boat or rack
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Nov 30 1995Tokyo Electron Limited(assignment on the face of the patent)
Feb 23 1996IWAI, HIROYUKITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0078350070 pdf
Feb 23 1996Tokyo Electron LimitedTokyo Electron LimitedCHANGE OF ADDRESS0081500223 pdf
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