Patent
   D893438
Priority
Aug 21 2017
Filed
Feb 02 2018
Issued
Aug 18 2020
Expiry
Aug 18 2035
Assg.orig
Entity
unknown
4
51
n/a
The ornamental design for a wafer boat, as shown and described.

FIG. 1 is a front, top, and left side perspective view of a wafer boat, showing our new design;

FIG. 2 is a front view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a cross-sectional view thereof, taken along line 5-5 in FIG. 2;

FIG. 6 is an enlarged portion view thereof, taken along line 6-6 in FIG. 5;

FIG. 7 is an enlarged cross-sectional view thereof, taken along line 7-7 in FIG. 2;

FIG. 8 is an enlarged cross-sectional view thereof, taken along line 8-8 in FIG. 2; and,

FIG. 9 is an enlarged cross-sectional view thereof, taken along line 9-9 in FIG. 2.

The broken lines shown in the drawings represent portions of the wafer boat that form no part of the claimed design. All sides not shown form no part of the claimed design.

Shimada, Koichi, Hasegawa, Tomoya

Patent Priority Assignee Title
D920935, Sep 20 2018 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D923279, Dec 04 2019 Crash barrel lifting basket
D940669, Nov 19 2018 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D965542, Mar 19 2020 KOKUSAI ELECTRIC CORPORATION Boat of substrate processing apparatus
Patent Priority Assignee Title
4165584, Jan 27 1977 ITT Corporation Apparatus for lapping or polishing materials
8216379, Apr 23 2009 Applied Materials, Inc. Non-circular substrate holders
9633822, Oct 31 2011 Kyocera Corporation Gas nozzle, plasma apparatus using the same, and method for manufacturing gas nozzle
20060102081,
20080102199,
20090017190,
20090155028,
20100190418,
20120234229,
20120240859,
20130276704,
20140261698,
20150118009,
D361752, Sep 17 1993 Tokyo Electron Kabushiki Kaisha; Tokyo Electron Tohoku Kabushiki Kaisha Wafer boat or rack for holding semiconductor wafers
D366868, Sep 29 1993 Tokyo Electron Kabushiki Kaisha; Tokyo Electron Toboku Kabushiki Kaisha Wafer boat or rack
D378675, May 30 1995 Tokyo Electron Limited Wafer boat
D378823, May 30 1995 Tokyo Electron Tohoku Limited Wafer boat
D380454, May 30 1995 Tokyo Electron Limited Wafer boat
D383377, May 03 1996 Cushioned furniture protector
D404015, Jan 31 1997 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
D404371, Aug 20 1997 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
D409158, Aug 20 1997 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
D411176, Aug 20 1997 TOKYO ELECTRON LLIMITED Wafer boat for use in a semiconductor wafer heat processing apparatus
D517073, Jul 14 2004 CAPITAL ONE SERVICES LLC Data card
D570308, May 01 2006 Tokyo Electron Limited Wafer boat
D570309, Oct 25 2006 Tokyo Electron Limited Wafer boat
D614593, Jul 21 2008 ASM KOREA LTD Substrate support for a semiconductor deposition apparatus
D674759, Aug 19 2010 EPISTAR CORPORATION Wafer carrier
D686175, Mar 20 2012 Veeco Instruments INC Wafer carrier having pockets
D686582, Mar 20 2012 Veeco Instruments INC Wafer carrier having pockets
D690671, Mar 20 2012 Veeco Instruments INC Wafer carrier having pockets
D695241, Mar 20 2012 Veeco Instruments INC Wafer carrier having pockets
D695242, Mar 20 2012 Veeco Instruments INC Wafer carrier having pockets
D704155, Feb 18 2011 EPISTAR CORPORATION Wafer carrier
D716742, Sep 13 2013 ASM IP Holding B.V. Substrate supporter for semiconductor deposition apparatus
D723077, Dec 03 2013 Applied Materials, Inc Chuck carrier film
D724553, Sep 13 2013 ASM IP Holding B.V. Substrate supporter for semiconductor deposition apparatus
D731409, Jun 26 2014 Water Technology, LLC Surface ornamentation for a passive solar heating article
D734730, Dec 27 2012 KOKUSAI ELECTRIC CORPORATION Boat of substrate processing apparatus
D737785, Jul 29 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D738329, Jul 29 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D747279, Jul 29 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D760180, Feb 21 2014 HZO, INC Hexcell channel arrangement for use in a boat for a deposition apparatus
D761745, Jun 28 2013 Sumitomo Electric Industries, Ltd. Semiconductor device
D771622, Jan 16 2015 Apple Inc Electronic device
D790489, Jul 08 2015 Ebara Corporation Vacuum contact pad
D793971, Mar 27 2015 Veeco Instruments INC Wafer carrier with a 14-pocket configuration
D793972, Mar 27 2015 Veeco Instruments INC Wafer carrier with a 31-pocket configuration
D839219, Feb 12 2016 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D846514, May 03 2018 KOKUSAI ELECTRIC CORPORATION Boat of substrate processing apparatus
D860146, Nov 30 2017 Veeco Instruments INC Wafer carrier with a 33-pocket configuration
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Jan 30 2018HASEGAWA, TOMOYATokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0448170572 pdf
Jan 31 2018SHIMADA, KOICHITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0448170572 pdf
Feb 02 2018Tokyo Electron Limited(assignment on the face of the patent)
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