Boat for substrate processing apparatus

Abstract

Description

FIG. 1 is a front, top and right side perspective view of a boat for substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a left side elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a rear elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof.

FIG. 8 is an enlarged cross-sectional view take along line 8-8 in FIG. 2 thereof;

FIG. 9 is an enlarged cross-sectional view take along line 9-9 in FIG. 2 thereof;

FIG. 10 is an enlarged portion view taken along line 10-10 in FIG. 2. thereof;

FIG. 11 is an enlarged cross-sectional view take along line 11-11 in FIG. 8 thereof; and,

FIG. 12 is an enlarged perspective view, which looked at the part shown by the solid line from the upper part.

The dashed-dot-dashed lines represent the boundary lines of the claimed design.

The broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design.

Claims

We claim the ornamental design for a boat for substrate processing apparatus, as shown and described.