Boat of substrate processing apparatus

Abstract

Description

FIG. 1 is a front, top and right side perspective view of a boat of substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is an enlarged portion view taken along line 8-8 in FIG. 2 thereof;

FIG. 9 is an enlarged portion view taken along line 9-9 in FIG. 2 thereof;

FIG. 10 is an enlarged portion view taken along line 10-10 in FIG. 2 thereof;

FIG. 11 is an enlarged perspective view of the claimed portion indicated by the solid line FIG. 8 thereof;

FIG. 12 is an enlarged front elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;

FIG. 13 is an enlarged left side elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;

FIG. 14 is an enlarged right side elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;

FIG. 15 is an enlarged top plan view of the claimed portion indicated by the solid line in FIG. 8 thereof;

FIG. 16 is an enlarged bottom plan elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof; and,

FIG. 17 is an enlarged rear elevational view of the claimed portion indicated by the solid line in FIG. 8.

The dashed-dot-dashed lines represent the boundary lines of the claimed design. The broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design.

Claims

The ornamental design for a boat of substrate processing apparatus, as shown and described.