Boat of substrate processing apparatus

Abstract

Description

FIG. 1 is a rear, top, and left side perspective view of a boat of substrate processing apparatus, showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a top plan view thereof; and

FIG. 7 is a bottom plan view thereof.

FIG. 8 is a cross-sectional view take along line 8-8 in FIG. 2; and,

FIG. 9 is an enlarged cross-sectional view take along line 9-9 in FIG. 8.

The broken lines shown in the drawings represent portions of the boat of substrate processing apparatus that form no part of the claimed design. The dash-dot-dash lines in FIGS. 8 and 9 illustrate the boundary of the enlarged portion view of FIG. 9 and do not form part of the claimed design.

Claims

The ornamental design for a boat of substrate processing apparatus, as shown and described.