Boat of substrate processing apparatus

Abstract

Description

FIG. 1 is a front, top and right side perspective view of a boat of substrate processing apparatus showing our new design;

FIG. 2 is a rear, top and left side perspective view thereof;

FIG. 3 is a front elevational view thereof;

FIG. 4 is a rear elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a right side elevational view thereof;

FIG. 7 is a top plan view thereof;

FIG. 8 is a bottom plan view thereof;

FIG. 9 is a cross sectional view taken along line 9-9 in FIG. 3; and,

FIG. 10 is a cross sectional view taken along line 10-10 in FIG. 3.

Claims

The ornamental design for a boat of substrate processing apparatus, as shown.