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Patent
D766850
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Priority
Mar 28 2014
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Filed
Sep 12 2014
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Issued
Sep 20 2016
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Expiry
Sep 20 2030
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Assg.orig
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Entity
unknown
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7
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28
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n/a
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The ornamental design for a wafer holder for manufacturing semiconductor, as shown and described.
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FIG. 1 is a front view of a wafer holder for manufacturing semiconductor showing our new design;
FIG. 2 is a rear view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a left side view thereof;
FIG. 7 is a front perspective view thereof;
FIG. 8 is an enlarged cross sectional view taken along line 8-8 in FIG. 1;
FIG. 9 is an enlarged portion view taken along line 9-9 in FIG. 1; and,
FIG. 10 is another front perspective view of FIG. 1 shown in a used condition with wafers shown in broken lines.
The features shown in dotted lines depict environmental subject matter only and form no part of the claimed design.
Machiyama, Wataru, Morisaki, Eisuke, Kobayashi, Hirokatsu, Sano, Yukio, Harashima, Masayuki
Patent |
Priority |
Assignee |
Title |
7582166, |
Aug 01 2003 |
SGL Carbon AG |
Holder for supporting wafers during semiconductor manufacture |
7644968, |
Jan 23 2004 |
Kawasaki Jukogyo Kabushiki Kaisha |
Substrate holding device |
9167625, |
Nov 23 2011 |
ASM IP Holding B.V. |
Radiation shielding for a substrate holder |
20050193952, |
|
|
|
D589474, |
Dec 06 2007 |
Tokyo Electron Limited |
Wafer holding member |
D589912, |
Jun 06 2007 |
Tokyo Electron Limited |
Wafer holding member |
D609652, |
Jul 22 2008 |
Tokyo Electron Limited |
Wafer attracting plate |
D614593, |
Jul 21 2008 |
ASM KOREA LTD |
Substrate support for a semiconductor deposition apparatus |
D616394, |
Mar 06 2009 |
Tokyo Electron Limited |
Support of wafer boat for manufacturing semiconductor wafers |
D616395, |
Mar 11 2009 |
Tokyo Electron Limited |
Support of wafer boat for manufacturing semiconductor wafers |
D654883, |
Oct 21 2010 |
Tokyo Electron Limited |
Top plate for reactor for manufacturing semiconductor |
D654884, |
Oct 21 2010 |
Tokyo Electron Limited |
Top plate for reactor for manufacturing semiconductor |
D655257, |
Oct 21 2010 |
Tokyo Electron Limited |
Top plate for reactor for manufacturing semiconductor |
D655259, |
Oct 21 2010 |
Tokyo Electron Limited |
Top plate for reactor for manufacturing semiconductor |
D674366, |
Jan 20 2011 |
Tokyo Electron Limited |
Wafer holding member |
D674759, |
Aug 19 2010 |
EPISTAR CORPORATION |
Wafer carrier |
D674761, |
Oct 20 2011 |
Tokyo Electron Limited |
Wafer holding member |
D684551, |
Jul 07 2011 |
|
Wafer polishing pad holder |
D686175, |
Mar 20 2012 |
Veeco Instruments INC |
Wafer carrier having pockets |
D703162, |
Oct 17 2012 |
Sumitomo Electric Industries, Ltd. |
Wafer holder for stepper |
D716742, |
Sep 13 2013 |
ASM IP Holding B.V. |
Substrate supporter for semiconductor deposition apparatus |
D723077, |
Dec 03 2013 |
Applied Materials, Inc |
Chuck carrier film |
D724553, |
Sep 13 2013 |
ASM IP Holding B.V. |
Substrate supporter for semiconductor deposition apparatus |
D734730, |
Dec 27 2012 |
KOKUSAI ELECTRIC CORPORATION |
Boat of substrate processing apparatus |
D737785, |
Jul 29 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
D738329, |
Jul 29 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
D747279, |
Jul 29 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
D753269, |
Jan 09 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Top plate |
Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a