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Patent
   D723077
Priority
Dec 03 2013
Filed
Dec 03 2013
Issued
Feb 24 2015
Expiry
Feb 24 2029
Inventors
Sakata, Cl…
Assg.orig
Applied Ma…
Assg.curr
Applied Ma…
Entity
unknown
Referenced by
22
References
20
Maint.:
n/a
The ornamental design for a chuck carrier film, as shown and described.

FIG. 1 is a top perspective view of a chuck carrier film.

FIG. 2 is a bottom perspective view of the chuck carrier film.

FIG. 3 is a top plan view of the chuck carrier film.

FIG. 4 is a back side view of the chuck carrier film.

FIG. 5 is a side view of the chuck carrier film, the opposite side view being a mirror image thereof; and,

FIG. 6 is a front side view of the chuck carrier film.

The broken lines in the figures form no part of the claimed design.
INVENTORS:

Sakata, Clinton

THIS PATENT IS REFERENCED BY THESE PATENTS:
Patent Priority Assignee Title
D741922, Jan 21 2015 Colgate-Palmolive Company Die cutter
D766850, Mar 28 2014 Tokyo Electron Limited Wafer holder for manufacturing semiconductor
D778247, Apr 16 2015 Veeco Instruments Inc.; VEECO INSTRUMENTS, INC Wafer carrier with a multi-pocket configuration
D790489, Jul 08 2015 Ebara Corporation Vacuum contact pad
D793971, Mar 27 2015 Veeco Instruments INC Wafer carrier with a 14-pocket configuration
D793972, Mar 27 2015 Veeco Instruments INC Wafer carrier with a 31-pocket configuration
D795208, Aug 18 2015 Tokyo Electron Limited Electrostatic chuck for semiconductor manufacturing equipment
D802472, Aug 06 2015 Pall Corporation Electrostatic chuck for semiconductor manufacturing equipment
D803802, Aug 18 2015 Tokyo Electron Limited Electrostatic chuck for semiconductor manufacturing equipment
D806046, Apr 16 2015 Veeco Instruments Inc. Wafer carrier with a multi-pocket configuration
D852762, Mar 27 2015 Veeco Instruments Inc. Wafer carrier with a 14-pocket configuration
D859331, Mar 31 2017 Ebara Corporation Vacuum contact pad
D893438, Aug 21 2017 Tokyo Electron Limited Wafer boat
D913256, Jul 31 2019 Antenna pattern for a semiconductive substrate carrier
D931240, Jul 30 2019 Applied Materials, Inc Substrate support pedestal
D947802, May 20 2020 Applied Materials, Inc Replaceable substrate carrier interfacing film
D984972, Mar 29 2021 BEIJING NAURA MICROELECTRONICS EQUIPMENT CO , LTD Electrostatic chuck for semiconductor manufacture
D989012, Sep 17 2020 Ebara Corporation Elastic membrane
ER4518,
ER6966,
ER8850,
ER8863,
THIS PATENT REFERENCES THESE PATENTS:
Patent Priority Assignee Title
6837774, Mar 28 2001 Taiwan Semiconductor Manufacturing Co., Ltd Linear chemical mechanical polishing apparatus equipped with programmable pneumatic support platen and method of using
7025664, Mar 31 2000 Novellus Systems, Inc Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
8157615, Apr 12 2008 Device and process for applying and/or detaching a wafer to/from a carrier
20030119431,
20120168040,
20130306215,
D420022, May 08 1996 Applied Materials, Inc. Electrostatic chuck with improved spacing and charge migration reduction mask
D420023, Nov 14 1997 Applied Materials, Inc. Electrostatic chuck with improved spacing mask and workpiece detection device
D425919, Nov 14 1997 Applied Materials, Inc Electrostatic chuck with improved spacing mask and workpiece detection device
D489739, Dec 20 2002 NGK SPARK PLUG CO , LTD Electrostatic chuck
D490096, Dec 20 2002 NGK SPARK PLUG CO , LTD Electrostatic chuck
D490827, Dec 20 2002 NGK SPARK PLUG CO , LTD Electrostatic chuck
D497171, Dec 20 2002 NGK SPARK PLUG CO , LTD Electrostatic chuck
D546784, Sep 29 2005 Tokyo Electron Limited Attracting disc for an electrostatic chuck for semiconductor production
D548705, Sep 29 2005 Tokyo Electron Limited Attracting disc for an electrostatic chuck for semiconductor production
D561206, Nov 25 2005 MOMENTIVE PERFORMANCE MATERIALS QUARTZ, INC Electrostatic chuck
D587222, Aug 01 2006 Tokyo Electron Limited; SUMITOMO OSAKA CEMENT CO , LTD Attracting plate of an electrostatic chuck for semiconductor manufacturing
D609655, Oct 03 2008 NGK Insulators, Ltd. Electrostatic chuck
D687791, Mar 20 2012 Veeco Instruments INC Multi-keyed wafer carrier
D703162, Oct 17 2012 Sumitomo Electric Industries, Ltd. Wafer holder for stepper
ASSIGNMENT RECORDS    Assignment records on the USPTO
//
Executed onAssignorAssigneeConveyanceFrameReelDoc
Dec 03 2013Applied Materials, Inc.(assignment on the face of the patent)
Dec 05 2013SAKATA, CLINTONApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0328020895 pdf
MAINTENANCE FEES AND DATES:    Maintenance records on the USPTO
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