FIG. 1 is a top view of the top part of an electrostatic chuck.
FIG. 2 is a left side elevational view thereof.
FIG. 3 is a perspective view of the top part of the electrostatic chuck; and,
FIG. 4 is a front side elevational view thereof, wherein the shaded (grey) area showing the extension of the electrode.
The broken line showing of the electrostatic chuck is included for the purpose of illustrating the bounds of the claimed design and forms no part of the claimed design.
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