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The ornamental design for an electrostatic chuck, as shown and described.
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FIG. 1 is a perspective view of the top, front and right side of an electrostatic chuck showing my new design;
FIG. 2 is a front elevational view thereof, the rear elevational view being a mirror image thereof;
FIG. 3 is a right side elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof; and,
FIG. 7 is a sectional view taken along the line 7--7 in FIG. 5.
Patent | Priority | Assignee | Title |
10679884, | Feb 23 2015 | II-VI Incorporated; MARLOW INDUSTRIES, INC ; EPIWORKS, INC ; LIGHTSMYTH TECHNOLOGIES, INC ; KAILIGHT PHOTONICS, INC ; COADNA PHOTONICS, INC ; Optium Corporation; Finisar Corporation; II-VI OPTICAL SYSTEMS, INC ; M CUBED TECHNOLOGIES, INC ; II-VI PHOTONICS US , INC ; II-VI DELAWARE, INC; II-VI OPTOELECTRONIC DEVICES, INC ; PHOTOP TECHNOLOGIES, INC | Film electrode for electrostatic chuck |
D561206, | Nov 25 2005 | MOMENTIVE PERFORMANCE MATERIALS QUARTZ, INC | Electrostatic chuck |
D684546, | Feb 04 2011 | SAMSUNG DISPLAY CO , LTD | Electroluminescence module |
D687394, | Feb 04 2011 | SAMSUNG DISPLAY CO , LTD | Electroluminescence module |
D708651, | Nov 22 2011 | Applied Materials, Inc | Electrostatic chuck |
D723077, | Dec 03 2013 | Applied Materials, Inc | Chuck carrier film |
D947802, | May 20 2020 | Applied Materials, Inc | Replaceable substrate carrier interfacing film |
Patent | Priority | Assignee | Title |
4518889, | Sep 22 1982 | North American Philips Corporation | Piezoelectric apodized ultrasound transducers |
4692836, | Oct 31 1983 | Toshiba Kikai Kabushiki Kaisha | Electrostatic chucks |
5474614, | Jun 10 1994 | Texas Instruments Incorporated | Method and apparatus for releasing a semiconductor wafer from an electrostatic clamp |
5535090, | Mar 03 1994 | Electrostatic chuck | |
5572398, | Nov 14 1994 | FM INDUSTRIES, INC | Tri-polar electrostatic chuck |
5671116, | Mar 10 1995 | Lam Research Corporation | Multilayered electrostatic chuck and method of manufacture thereof |
5838528, | Jul 10 1995 | Applied Materials, Inc | Electrostatic chuck assembly |
6268994, | Jul 09 1999 | FM INDUSTRIES, INC | Electrostatic chuck and method of manufacture |
6639783, | Sep 08 1998 | ABL IP Holding, LLC | Multi-layer ceramic electrostatic chuck with integrated channel |
D420022, | May 08 1996 | Applied Materials, Inc. | Electrostatic chuck with improved spacing and charge migration reduction mask |
D425919, | Nov 14 1997 | Applied Materials, Inc | Electrostatic chuck with improved spacing mask and workpiece detection device |
Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
Jun 20 2003 | NGK Spark Plug Co., Ltd. | (assignment on the face of the patent) | / | |||
Jul 01 2003 | OKUGAWA, KEISUKE | NGK SPARK PLUG CO , LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 014508 | /0708 |
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