Patent
   D425919
Priority
Nov 14 1997
Filed
Nov 14 1997
Issued
May 30 2000
Expiry
May 30 2014
Assg.orig
Entity
unknown
38
3
n/a
The ornamental design for an electrostatic chuck with improved spacing mask and workpiece detection device, as shown.

FIG. 1 depicts a top view of the electrostatic chuck with improved spacing mask and workpiece detection device;

FIG. 2 depicts an elevation view of the electrostatic chuck when looking up along the y-axis of FIG. 1;

FIG. 3 depicts a detailed view of part of a surface and circumferential edge of the electrostatic chuck seen of FIG. 2;

FIG. 4 depicts an elevation view of the electrostatic chuck when looking down along the y-axis of FIG. 1;

FIG. 5 depicts an elevation view of the electrostatic chuck when looking to the left along the x-axis of FIG. 1, the view when looking to the right being a mirror image to that of FIG. 5; and,

FIG. 6 is a bottom view of the electrostatic chuck.

Burkhart, Vincent E., Flanigan, Allen, Sansoni, Steven

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Executed onAssignorAssigneeConveyanceFrameReelDoc
Nov 14 1997Applied Materials, Inc.(assignment on the face of the patent)
Dec 01 1997SANSONI, STEVENApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0092410013 pdf
Dec 04 1997FLANIGAN, ALLENApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0092410013 pdf
Dec 17 1997BURKHART, VINCENT E Applied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0092410013 pdf
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