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The ornamental design for a electrostatic chuck, as shown and described.
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FIG. 1 is a perspective view of the top, front and right side of an electrostatic chuck showing my new design;
FIG. 2 is a front elevational view thereof, the rear elevational view being a mirror image thereof;
FIG. 3 is a right side elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof; and,
FIG. 7 is a sectional view taking along the line 7--7 in FIG. 5.
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Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
Jun 20 2003 | NGK Spark Plug Co., Ltd. | (assignment on the face of the patent) | / | |||
Jul 01 2003 | OKUGAWA, KEISUKE | NGK SPARK PLUG CO , LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 014509 | /0064 |
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