Electrostatic chuck with improved spacing mask and workpiece detection device

Abstract

Description

FIG. 1 depicts a top view of the electrostatic chuck with improved spacing mask and workpiece detection device;

FIG. 2 depicts an elevation view of the electrostatic chuck when looking up along the y-axis of FIG. 1, the view when looking down along the y-axis, being identical to that of FIG. 2;

FIG. 3 depicts a detailed view of part of a surface and circumferential edge of the electrostatic chuck seen in FIG. 2;

FIG. 4 depicts a bottom view of the electrostatic chuck;

FIG. 5 depicts an elevation view of the electrostatic chuck when looking to the left along the x-axis of FIG. 1; and,

FIG. 6 depicts an elevation view of the electrostatic chuck when looking to the right along the x-axis of FIG. 1.

Claims

The ornamental design for an electrostatic chuck with improved spacing mask and workpiece detection device, as shown.