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Patent
   D931240
Priority
Jul 30 2019
Filed
Jul 30 2019
Issued
Sep 21 2021
Expiry
Sep 21 2036
Inventors
Willwerth,…
Assg.orig
Applied Ma…
Assg.curr
Applied Ma…
Entity
unknown
Referenced by
10
References
32
Maint.:
n/a
The ornamental design for a substrate support pedestal, as shown and described.

FIG. 1 is a top, front, right side perspective view of a substrate support pedestal, showing our new design.

FIG. 2 is a top plan view thereof.

FIG. 3 is a bottom plan view thereof.

FIG. 4 is a front elevation view thereof.

FIG. 5 is a back elevation view thereof.

FIG. 6 is a right side elevation view thereof; and,

FIG. 7 is a left side elevation view thereof.

The broken lines in FIGS. 1-7 represent unclaimed environment forming no part of the claimed design.
INVENTORS:

Willwerth, Michael D., Lee, Changhun, Ludwig, Jeffrey

THIS PATENT IS REFERENCED BY THESE PATENTS:
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D989012, Sep 17 2020 Ebara Corporation Elastic membrane
ER1441,
ER4518,
ER4784,
ER5982,
ER6103,
ER6966,
ER8863,
THIS PATENT REFERENCES THESE PATENTS:
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ASSIGNMENT RECORDS    Assignment records on the USPTO
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Jul 30 2019Applied Materials, Inc.(assignment on the face of the patent)
Sep 17 2019LEE, CHANGHUNApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0506010471 pdf
Sep 17 2019WILLWERTH, MICHAEL D Applied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0506010471 pdf
Sep 17 2019LUDWIG, JEFFREYApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0506010471 pdf
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