Patent
   D489740
Priority
Dec 20 2002
Filed
Jun 20 2003
Issued
May 11 2004
Expiry
May 11 2018
Assg.orig
Entity
unknown
0
10
n/a
The ornamental design for a electrostatic chuck, as shown and described.

FIG. 1 is a perspective view of the top, front and right side of an electrostatic chuck showing my new design;

FIG. 2 is a front elevational view thereof, the rear elevational view being a mirror image thereof;

FIG. 3 is a right side elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof; and,

FIG. 7 is a sectional view taking along the line 7--7 in FIG. 5.

Okugawa, Keisuke

Patent Priority Assignee Title
Patent Priority Assignee Title
5535090, Mar 03 1994 Electrostatic chuck
5656093, Mar 08 1996 Applied Materials, Inc. Wafer spacing mask for a substrate support chuck and method of fabricating same
5825607, May 08 1996 Applied Materials, Inc. Insulated wafer spacing mask for a substrate support chuck and method of fabricating same
5838528, Jul 10 1995 Applied Materials, Inc Electrostatic chuck assembly
6081414, May 01 1998 Applied Materials, Inc Apparatus for improved biasing and retaining of a workpiece in a workpiece processing system
D406852, Nov 14 1997 Applied Materials, Inc Electrostatic chuck with improved spacing mask and workpiece detection device
D407073, May 08 1996 Applied Materials, Inc. Electrostatic chuck with improved spacing and charge migration reduction mask
D420022, May 08 1996 Applied Materials, Inc. Electrostatic chuck with improved spacing and charge migration reduction mask
D420023, Nov 14 1997 Applied Materials, Inc. Electrostatic chuck with improved spacing mask and workpiece detection device
D425919, Nov 14 1997 Applied Materials, Inc Electrostatic chuck with improved spacing mask and workpiece detection device
//
Executed onAssignorAssigneeConveyanceFrameReelDoc
Jun 20 2003NGK Spark Plug Co., Ltd.(assignment on the face of the patent)
Jul 01 2003OKUGAWA, KEISUKENGK SPARK PLUG CO , LTD ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0145090890 pdf
n/a
Date Maintenance Fee Events


n/a
Date Maintenance Schedule