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The ornamental design for an electrostatic chuck with improved spacing mask and workpiece detection device, as shown. |
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FIG. 1 is a top view of the electrostatic chuck with the improved spacing mask and workpiece detection device;
FIG. 2 is an elevation view of the electrostatic chuck when looking down along the y-axis of FIG. 1;
FIG. 3 is a detailed view of part of the electrostatic chuck seen in FIG. 2;
FIG. 4 is a bottom view of the electrostatic chuck;
FIG. 5 is an elevation view of the electrostatic chuck when looking up along the y-axis of FIG. 1;
FIG. 6 is an elevation view of the electrostatic chuck when looking to the left along the x-axis of FIG. 1; and,
FIG. 7 is an elevation view of the electrostatic chuck when looking to the right along the x-axis in FIG. 1.
Burkhart, Vincent E., Flanigan, Allen, Sansoni, Steven
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| Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
| Jan 07 1999 | FLANIGAN, ALLEN | Applied Materials, Inc | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 009701 | /0392 | |
| Jan 07 1999 | SANSONI, STEVEN | Applied Materials, Inc | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 009701 | /0392 | |
| Jan 08 1999 | BURKHART, VINCENT E | Applied Materials, Inc | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 009701 | /0392 | |
| Jan 09 1999 | Applied Materials, Inc. | (assignment on the face of the patent) | / |
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