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The ornamental design for an electrostatic chuck with improved spacing mask and workpiece detection device, as shown. |
FIG. 1 is a top view of the electrostatic chuck with the improved spacing mask and workpiece detection device;
FIG. 2 is an elevation view of the electrostatic chuck when looking down along the y-axis of FIG. 1;
FIG. 3 is a detailed view of part of the electrostatic chuck seen in FIG. 2;
FIG. 4 is a bottom view of the electrostatic chuck;
FIG. 5 is an elevation view of the electrostatic chuck when looking up along the y-axis of FIG. 1;
FIG. 6 is an elevation view of the electrostatic chuck when looking to the left along the x-axis of FIG. 1; and,
FIG. 7 is an elevation view of the electrostatic chuck when looking to the right along the x-axis in FIG. 1.
Burkhart, Vincent E., Flanigan, Allen, Sansoni, Steven
Patent | Priority | Assignee | Title |
D489739, | Dec 20 2002 | NGK SPARK PLUG CO , LTD | Electrostatic chuck |
D489740, | Dec 20 2002 | NGK SPARK PLUG CO , LTD | Electrostatic chuck |
D490093, | Dec 20 2002 | NGK SPARK PLUG CO , LTD | Electrostatic chuck |
D490094, | Dec 20 2002 | NGK SPARK PLUG CO , LTD | Electrostatic chuck |
D490095, | Dec 20 2002 | NGK SPARK PLUG CO , LTD | Electrostatic chuck |
D490827, | Dec 20 2002 | NGK SPARK PLUG CO , LTD | Electrostatic chuck |
D723077, | Dec 03 2013 | Applied Materials, Inc | Chuck carrier film |
D947802, | May 20 2020 | Applied Materials, Inc | Replaceable substrate carrier interfacing film |
Patent | Priority | Assignee | Title |
5671116, | Mar 10 1995 | Lam Research Corporation | Multilayered electrostatic chuck and method of manufacture thereof |
5691876, | Jan 31 1995 | Applied Materials, Inc | High temperature polyimide electrostatic chuck |
5745332, | May 08 1996 | Applied Materials, Inc. | Monopolar electrostatic chuck having an electrode in contact with a workpiece |
D406852, | Nov 14 1997 | Applied Materials, Inc | Electrostatic chuck with improved spacing mask and workpiece detection device |
Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
Jan 07 1999 | FLANIGAN, ALLEN | Applied Materials, Inc | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 009701 | /0392 | |
Jan 07 1999 | SANSONI, STEVEN | Applied Materials, Inc | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 009701 | /0392 | |
Jan 08 1999 | BURKHART, VINCENT E | Applied Materials, Inc | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 009701 | /0392 | |
Jan 09 1999 | Applied Materials, Inc. | (assignment on the face of the patent) | / |
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