Patent
   D420023
Priority
Nov 14 1997
Filed
Jan 09 1999
Issued
Feb 01 2000
Expiry
Feb 01 2014
Assg.orig
Entity
unknown
8
4
n/a
The ornamental design for an electrostatic chuck with improved spacing mask and workpiece detection device, as shown.

FIG. 1 is a top view of the electrostatic chuck with the improved spacing mask and workpiece detection device;

FIG. 2 is an elevation view of the electrostatic chuck when looking down along the y-axis of FIG. 1;

FIG. 3 is a detailed view of part of the electrostatic chuck seen in FIG. 2;

FIG. 4 is a bottom view of the electrostatic chuck;

FIG. 5 is an elevation view of the electrostatic chuck when looking up along the y-axis of FIG. 1;

FIG. 6 is an elevation view of the electrostatic chuck when looking to the left along the x-axis of FIG. 1; and,

FIG. 7 is an elevation view of the electrostatic chuck when looking to the right along the x-axis in FIG. 1.

Burkhart, Vincent E., Flanigan, Allen, Sansoni, Steven

Patent Priority Assignee Title
D489739, Dec 20 2002 NGK SPARK PLUG CO , LTD Electrostatic chuck
D489740, Dec 20 2002 NGK SPARK PLUG CO , LTD Electrostatic chuck
D490093, Dec 20 2002 NGK SPARK PLUG CO , LTD Electrostatic chuck
D490094, Dec 20 2002 NGK SPARK PLUG CO , LTD Electrostatic chuck
D490095, Dec 20 2002 NGK SPARK PLUG CO , LTD Electrostatic chuck
D490827, Dec 20 2002 NGK SPARK PLUG CO , LTD Electrostatic chuck
D723077, Dec 03 2013 Applied Materials, Inc Chuck carrier film
D947802, May 20 2020 Applied Materials, Inc Replaceable substrate carrier interfacing film
Patent Priority Assignee Title
5671116, Mar 10 1995 Lam Research Corporation Multilayered electrostatic chuck and method of manufacture thereof
5691876, Jan 31 1995 Applied Materials, Inc High temperature polyimide electrostatic chuck
5745332, May 08 1996 Applied Materials, Inc. Monopolar electrostatic chuck having an electrode in contact with a workpiece
D406852, Nov 14 1997 Applied Materials, Inc Electrostatic chuck with improved spacing mask and workpiece detection device
////
Executed onAssignorAssigneeConveyanceFrameReelDoc
Jan 07 1999FLANIGAN, ALLENApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0097010392 pdf
Jan 07 1999SANSONI, STEVENApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0097010392 pdf
Jan 08 1999BURKHART, VINCENT E Applied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0097010392 pdf
Jan 09 1999Applied Materials, Inc.(assignment on the face of the patent)
n/a
Date Maintenance Fee Events


n/a
Date Maintenance Schedule