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Patent
   D966357
Priority
Dec 02 2020
Filed
Dec 31 2021
Issued
Oct 11 2022
Expiry
Oct 11 2037
Inventors
Savandaiah…
Assg.orig
Applied Ma…
APPLIED MA…
Assg.curr
Applied Ma…
Entity
unknown
Referenced by
12
References
135
Maint.:
n/a
We claim the ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

FIG. 1 is a top isometric view of a sputter target for a physical vapor deposition chamber, according to our novel design.

FIG. 2 is a top plan view thereof.

FIG. 3 is a bottom plan view thereof.

FIG. 4 is a right side elevation view thereof.

FIG. 5 is a left side elevation view thereof.

FIG. 6 is a front elevation thereof.

FIG. 7 is a back elevation view thereof; and,

FIG. 8 is an enlarged partial right side elevation view showing portions of the design in greater detail.

The broken lines in the drawings represent unclaimed environment and form no part of the claimed design.

The long dash short dash broken lines in FIGS. 4 and 8 represent the region of enlargement taken from FIG. 4 as shown in FIG. 8 and form no part of the claimed design.
INVENTORS:

Savandaiah, Kirankumar Neelasandra, Gunther, David, Song, Jiao, Shimoga Mylarappa, Madan Kumar

THIS PATENT IS REFERENCED BY THESE PATENTS:
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ASSIGNMENT RECORDS    Assignment records on the USPTO
//////
Executed onAssignorAssigneeConveyanceFrameReelDoc
Dec 07 2020GUNTHER, DAVIDApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0585420339 pdf
Dec 07 2020SAVANDAIAH, KIRANKUMAR NEELASANDRAApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0585420339 pdf
Dec 07 2020SHIMOGA MYLARAPPA, MADAN KUMARApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0585420339 pdf
Dec 07 2020SONG, JIAOAPPLIED MATERIALS SINGAPORE TECHNOLOGY PTE LTD ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0585420473 pdf
Jan 22 2021APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE LTD Applied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0593360017 pdf
Dec 31 2021Applied Materials, Inc.(assignment on the face of the patent)
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