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Patent
D836572
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Priority
Sep 30 2016
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Filed
Sep 30 2016
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Issued
Dec 25 2018
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Expiry
Dec 25 2033
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Assg.orig
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Entity
unknown
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21
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25
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n/a
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The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.
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FIG. 1 is a perspective view of a target profile for a physical vapor deposition chamber target, showing our new design;
FIG. 2 is a top plan view thereof;
FIG. 3 is a bottom plan view thereof;
FIG. 4 is a right side elevation view thereof;
FIG. 5 is a left side elevation view thereof;
FIG. 6 is a front elevation view thereof;
FIG. 7 is a back elevation view thereof; and,
FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 2.
The dashed lines in FIGS. 1-8 represent disclaimed matter that forms no part of the claimed design.
Wang, Xiaodong, Zhang, Fuhong, Riker, Martin Lee
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Tokyo Electron Limited |
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Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a