FIG. 1 is a top perspective view of a target profile for a physical vapor deposition chamber target, according to the new design.
FIG. 2 is a bottom perspective view thereof.
FIG. 3 is a top plan view thereof.
FIG. 4 is a bottom plan view thereof.
FIG. 5 is a right side elevation view thereof.
FIG. 6 is a left side elevation view thereof.
FIG. 7 is a front elevation view thereof.
FIG. 8 is a back elevation view thereof; and,
FIG. 9 is an enlarged cross sectional view taken along line 9-9 in FIG. 4.
Dashed lines in FIGS. 1-9 represent features of the target profile for a physical vapor deposition chamber target that form no part of the claimed design.
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