| Patent |
Priority |
Assignee |
Title |
| 10014170, |
May 14 2015 |
Lam Research Corporation |
Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity |
| 10023960, |
Sep 12 2012 |
ASM IP Holdings B.V. |
Process gas management for an inductively-coupled plasma deposition reactor |
| 10032628, |
May 02 2016 |
ASM IP HOLDING B V |
Source/drain performance through conformal solid state doping |
| 10043661, |
Jul 13 2015 |
ASM IP Holding B.V. |
Method for protecting layer by forming hydrocarbon-based extremely thin film |
| 10083836, |
Jul 24 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Formation of boron-doped titanium metal films with high work function |
| 10087522, |
Apr 21 2016 |
ASM IP HOLDING B V |
Deposition of metal borides |
| 10087525, |
Aug 04 2015 |
ASM IP Holding B.V. |
Variable gap hard stop design |
| 10090316, |
Sep 01 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
3D stacked multilayer semiconductor memory using doped select transistor channel |
| 10094034, |
Aug 28 2015 |
Lam Research Corporation |
Edge flow element for electroplating apparatus |
| 10103040, |
Mar 31 2017 |
ASM IP HOLDING B V |
Apparatus and method for manufacturing a semiconductor device |
| 10134757, |
Nov 07 2016 |
ASM IP Holding B.V. |
Method of processing a substrate and a device manufactured by using the method |
| 10167557, |
Mar 18 2014 |
ASM IP Holding B.V. |
Gas distribution system, reactor including the system, and methods of using the same |
| 10177025, |
Jul 28 2016 |
ASM IP HOLDING B V |
Method and apparatus for filling a gap |
| 10179947, |
Nov 26 2013 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming conformal nitrided, oxidized, or carbonized dielectric film by atomic layer deposition |
| 10190213, |
Apr 21 2016 |
ASM IP HOLDING B V |
Deposition of metal borides |
| 10190230, |
Jul 02 2010 |
Novellus Systems, Inc. |
Cross flow manifold for electroplating apparatus |
| 10211308, |
Oct 21 2015 |
ASM IP Holding B.V. |
NbMC layers |
| 10229833, |
Nov 01 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
| 10233556, |
Jul 02 2010 |
Lam Research Corporation |
Dynamic modulation of cross flow manifold during electroplating |
| 10236177, |
Aug 22 2017 |
ASM IP HOLDING B V |
Methods for depositing a doped germanium tin semiconductor and related semiconductor device structures |
| 10249524, |
Aug 09 2017 |
ASM IP Holding B.V. |
Cassette holder assembly for a substrate cassette and holding member for use in such assembly |
| 10249577, |
May 17 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of forming metal interconnection and method of fabricating semiconductor apparatus using the method |
| 10262859, |
Mar 24 2016 |
ASM IP Holding B.V. |
Process for forming a film on a substrate using multi-port injection assemblies |
| 10269558, |
Dec 22 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of forming a structure on a substrate |
| 10276355, |
Mar 12 2015 |
ASM IP Holding B.V. |
Multi-zone reactor, system including the reactor, and method of using the same |
| 10283353, |
Mar 29 2017 |
ASM IP HOLDING B V |
Method of reforming insulating film deposited on substrate with recess pattern |
| 10290508, |
Dec 05 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming vertical spacers for spacer-defined patterning |
| 10301739, |
May 01 2013 |
Lam Research Corporation |
Anisotropic high resistance ionic current source (AHRICS) |
| 10312055, |
Jul 26 2017 |
ASM IP Holding B.V. |
Method of depositing film by PEALD using negative bias |
| 10312129, |
Sep 29 2015 |
ASM IP Holding B.V. |
Variable adjustment for precise matching of multiple chamber cavity housings |
| 10319588, |
Oct 10 2017 |
ASM IP HOLDING B V |
Method for depositing a metal chalcogenide on a substrate by cyclical deposition |
| 10322384, |
Nov 09 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Counter flow mixer for process chamber |
| 10340125, |
Mar 08 2013 |
ASM IP Holding B.V. |
Pulsed remote plasma method and system |
| 10340135, |
Nov 28 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of topologically restricted plasma-enhanced cyclic deposition of silicon or metal nitride |
| 10343920, |
Mar 18 2016 |
ASM IP HOLDING B V |
Aligned carbon nanotubes |
| 10361201, |
Sep 27 2013 |
ASM IP Holding B.V. |
Semiconductor structure and device formed using selective epitaxial process |
| 10364496, |
Jun 27 2011 |
ASM IP Holding B.V. |
Dual section module having shared and unshared mass flow controllers |
| 10364505, |
May 24 2016 |
Lam Research Corporation |
Dynamic modulation of cross flow manifold during elecroplating |
| 10366864, |
Mar 18 2013 |
ASM IP Holding B.V. |
Method and system for in-situ formation of intermediate reactive species |
| 10367080, |
May 02 2016 |
ASM IP HOLDING B V |
Method of forming a germanium oxynitride film |
| 10378106, |
Nov 14 2008 |
ASM IP Holding B.V. |
Method of forming insulation film by modified PEALD |
| 10381219, |
Oct 25 2018 |
ASM IP Holding B.V. |
Methods for forming a silicon nitride film |
| 10381226, |
Jul 27 2016 |
ASM IP Holding B.V. |
Method of processing substrate |
| 10388509, |
Jun 28 2016 |
ASM IP Holding B.V. |
Formation of epitaxial layers via dislocation filtering |
| 10388513, |
Jul 03 2018 |
ASM IP Holding B.V. |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| 10395919, |
Jul 28 2016 |
ASM IP HOLDING B V |
Method and apparatus for filling a gap |
| 10403504, |
Oct 05 2017 |
ASM IP HOLDING B V |
Method for selectively depositing a metallic film on a substrate |
| 10410943, |
Oct 13 2016 |
ASM IP Holding B.V. |
Method for passivating a surface of a semiconductor and related systems |
| 10435790, |
Nov 01 2016 |
ASM IP Holding B.V. |
Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap |
| 10438965, |
Dec 22 2014 |
ASM IP Holding B.V. |
Semiconductor device and manufacturing method thereof |
| 10446393, |
May 08 2017 |
ASM IP Holding B.V. |
Methods for forming silicon-containing epitaxial layers and related semiconductor device structures |
| 10458018, |
Jun 26 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Structures including metal carbide material, devices including the structures, and methods of forming same |
| 10468251, |
Feb 19 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming spacers using silicon nitride film for spacer-defined multiple patterning |
| 10468261, |
Feb 15 2017 |
ASM IP HOLDING B V |
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
| 10468262, |
Feb 15 2017 |
ASM IP Holding B.V. |
Methods for forming a metallic film on a substrate by a cyclical deposition and related semiconductor device structures |
| 10480072, |
Apr 06 2009 |
ASM IP HOLDING B V |
Semiconductor processing reactor and components thereof |
| 10483099, |
Jul 26 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming thermally stable organosilicon polymer film |
| 10501866, |
Mar 09 2016 |
ASM IP Holding B.V. |
Gas distribution apparatus for improved film uniformity in an epitaxial system |
| 10504742, |
May 31 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of atomic layer etching using hydrogen plasma |
| 10510536, |
Mar 29 2018 |
ASM IP Holding B.V. |
Method of depositing a co-doped polysilicon film on a surface of a substrate within a reaction chamber |
| 10529542, |
Mar 11 2015 |
ASM IP Holdings B.V. |
Cross-flow reactor and method |
| 10529554, |
Feb 19 2016 |
ASM IP Holding B.V. |
Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
| 10529563, |
Mar 29 2017 |
ASM IP Holdings B.V. |
Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
| 10535516, |
Feb 01 2018 |
ASM IP Holdings B.V. |
Method for depositing a semiconductor structure on a surface of a substrate and related semiconductor structures |
| 10541173, |
Jul 08 2016 |
ASM IP Holding B.V. |
Selective deposition method to form air gaps |
| 10541333, |
Jul 19 2017 |
ASM IP Holding B.V. |
Method for depositing a group IV semiconductor and related semiconductor device structures |
| 10559458, |
Nov 26 2018 |
ASM IP Holding B.V. |
Method of forming oxynitride film |
| 10561975, |
Oct 07 2014 |
ASM IP Holdings B.V. |
Variable conductance gas distribution apparatus and method |
| 10566223, |
Aug 28 2012 |
ASM IP Holdings B.V.; ASM IP HOLDING B V |
Systems and methods for dynamic semiconductor process scheduling |
| 10590535, |
Jul 26 2017 |
ASM IP HOLDING B V |
Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
| 10600673, |
Jul 07 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Magnetic susceptor to baseplate seal |
| 10604847, |
Mar 18 2014 |
ASM IP Holding B.V. |
Gas distribution system, reactor including the system, and methods of using the same |
| 10605530, |
Jul 26 2017 |
ASM IP Holding B.V. |
Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace |
| 10607895, |
Sep 18 2017 |
ASM IP HOLDING B V |
Method for forming a semiconductor device structure comprising a gate fill metal |
| 10612136, |
Jun 29 2018 |
ASM IP HOLDING B V ; ASM IP Holding, B.V. |
Temperature-controlled flange and reactor system including same |
| 10612137, |
Jul 08 2016 |
ASM IP HOLDING B V |
Organic reactants for atomic layer deposition |
| 10622375, |
Nov 07 2016 |
ASM IP Holding B.V. |
Method of processing a substrate and a device manufactured by using the method |
| 10643826, |
Oct 26 2016 |
ASM IP HOLDING B V |
Methods for thermally calibrating reaction chambers |
| 10643904, |
Nov 01 2016 |
ASM IP HOLDING B V |
Methods for forming a semiconductor device and related semiconductor device structures |
| 10644025, |
Nov 07 2016 |
ASM IP Holding B.V. |
Method of processing a substrate and a device manufactured by using the method |
| 10655221, |
Feb 09 2017 |
ASM IP Holding B.V. |
Method for depositing oxide film by thermal ALD and PEALD |
| 10658181, |
Feb 20 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of spacer-defined direct patterning in semiconductor fabrication |
| 10658205, |
Sep 28 2017 |
ASM IP HOLDING B V |
Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
| 10662545, |
Dec 12 2012 |
Novellus Systems, Inc. |
Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating |
| 10665452, |
May 02 2016 |
ASM IP Holdings B.V. |
Source/drain performance through conformal solid state doping |
| 10672636, |
Aug 09 2017 |
ASM IP Holding B.V. |
Cassette holder assembly for a substrate cassette and holding member for use in such assembly |
| 10683571, |
Feb 25 2014 |
ASM IP Holding B.V. |
Gas supply manifold and method of supplying gases to chamber using same |
| 10685834, |
Jul 05 2017 |
ASM IP Holdings B.V. |
Methods for forming a silicon germanium tin layer and related semiconductor device structures |
| 10692741, |
Aug 08 2017 |
ASM IP Holdings B.V.; ASM IP HOLDING B V |
Radiation shield |
| 10707106, |
Jun 06 2011 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules |
| 10714315, |
Oct 12 2012 |
ASM IP Holdings B.V.; ASM IP HOLDING B V |
Semiconductor reaction chamber showerhead |
| 10714335, |
Apr 25 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of depositing thin film and method of manufacturing semiconductor device |
| 10714350, |
Nov 01 2016 |
ASM IP Holdings, B.V.; ASM IP HOLDING B V |
Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
| 10714385, |
Jul 19 2016 |
ASM IP Holding B.V. |
Selective deposition of tungsten |
| 10720322, |
Feb 19 2016 |
ASM IP Holding B.V. |
Method for forming silicon nitride film selectively on top surface |
| 10720331, |
Nov 01 2016 |
ASM IP Holdings, B.V. |
Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
| 10731249, |
Feb 15 2018 |
ASM IP HOLDING B V |
Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
| 10734223, |
Oct 10 2017 |
ASM IP Holding B.V. |
Method for depositing a metal chalcogenide on a substrate by cyclical deposition |
| 10734244, |
Nov 16 2017 |
ASM IP Holding B.V. |
Method of processing a substrate and a device manufactured by the same |
| 10734497, |
Jul 18 2017 |
ASM IP HOLDING B V |
Methods for forming a semiconductor device structure and related semiconductor device structures |
| 10741385, |
Jul 28 2016 |
ASM IP HOLDING B V |
Method and apparatus for filling a gap |
| 10755922, |
Jul 03 2018 |
ASM IP HOLDING B V |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| 10755923, |
Jul 03 2018 |
ASM IP Holding B.V. |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| 10767789, |
Jul 16 2018 |
ASM IP Holding B.V. |
Diaphragm valves, valve components, and methods for forming valve components |
| 10770286, |
May 08 2017 |
ASM IP Holdings B.V.; ASM IP HOLDING B V |
Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
| 10770336, |
Aug 08 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Substrate lift mechanism and reactor including same |
| 10781527, |
Sep 18 2017 |
Lam Research Corporation |
Methods and apparatus for controlling delivery of cross flowing and impinging electrolyte during electroplating |
| 10784102, |
Dec 22 2016 |
ASM IP Holding B.V. |
Method of forming a structure on a substrate |
| 10787741, |
Aug 21 2014 |
ASM IP Holding B.V. |
Method and system for in situ formation of gas-phase compounds |
| 10797133, |
Jun 21 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
| 10804098, |
Aug 14 2009 |
ASM IP HOLDING B V |
Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species |
| 10811256, |
Oct 16 2018 |
ASM IP Holding B.V. |
Method for etching a carbon-containing feature |
| 10818758, |
Nov 16 2018 |
ASM IP Holding B.V. |
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
| 10829852, |
Aug 16 2018 |
ASM IP Holding B.V. |
Gas distribution device for a wafer processing apparatus |
| 10832903, |
Oct 28 2011 |
ASM IP Holding B.V. |
Process feed management for semiconductor substrate processing |
| 10844484, |
Sep 22 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
| 10844486, |
Apr 06 2009 |
ASM IP HOLDING B V |
Semiconductor processing reactor and components thereof |
| 10847365, |
Oct 11 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of forming conformal silicon carbide film by cyclic CVD |
| 10847366, |
Nov 16 2018 |
ASM IP Holding B.V. |
Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
| 10847371, |
Mar 27 2018 |
ASM IP Holding B.V. |
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode |
| 10851456, |
Apr 21 2016 |
ASM IP Holding B.V. |
Deposition of metal borides |
| 10854498, |
Jul 15 2011 |
ASM IP Holding B.V.; ASM JAPAN K K |
Wafer-supporting device and method for producing same |
| 10858737, |
Jul 28 2014 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Showerhead assembly and components thereof |
| 10865475, |
Apr 21 2016 |
ASM IP HOLDING B V |
Deposition of metal borides and silicides |
| 10867786, |
Mar 30 2018 |
ASM IP Holding B.V. |
Substrate processing method |
| 10867788, |
Dec 28 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of forming a structure on a substrate |
| 10872771, |
Jan 16 2018 |
ASM IP Holding B. V. |
Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
| 10883175, |
Aug 09 2018 |
ASM IP HOLDING B V |
Vertical furnace for processing substrates and a liner for use therein |
| 10886123, |
Jun 02 2017 |
ASM IP Holding B.V. |
Methods for forming low temperature semiconductor layers and related semiconductor device structures |
| 10892156, |
May 08 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Methods for forming a silicon nitride film on a substrate and related semiconductor device structures |
| 10896820, |
Feb 14 2018 |
ASM IP HOLDING B V |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
| 10910262, |
Nov 16 2017 |
ASM IP HOLDING B V |
Method of selectively depositing a capping layer structure on a semiconductor device structure |
| 10914004, |
Jun 29 2018 |
ASM IP Holding B.V. |
Thin-film deposition method and manufacturing method of semiconductor device |
| 10923340, |
May 14 2015 |
Lam Research Corporation |
Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity |
| 10923344, |
Oct 30 2017 |
ASM IP HOLDING B V |
Methods for forming a semiconductor structure and related semiconductor structures |
| 10928731, |
Sep 21 2017 |
ASM IP Holding B.V. |
Method of sequential infiltration synthesis treatment of infiltrateable material and structures and devices formed using same |
| 10934619, |
Nov 15 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Gas supply unit and substrate processing apparatus including the gas supply unit |
| 10941490, |
Oct 07 2014 |
ASM IP Holding B.V. |
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
| 10943771, |
Oct 26 2016 |
ASM IP Holding B.V. |
Methods for thermally calibrating reaction chambers |
| 10950432, |
Apr 25 2017 |
ASM IP Holding B.V. |
Method of depositing thin film and method of manufacturing semiconductor device |
| 10975470, |
Feb 23 2018 |
ASM IP Holding B.V. |
Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
| 11001925, |
Dec 19 2016 |
ASM IP Holding B.V. |
Substrate processing apparatus |
| 11001934, |
Aug 21 2017 |
Lam Research Corporation |
Methods and apparatus for flow isolation and focusing during electroplating |
| 11004977, |
Jul 19 2017 |
ASM IP Holding B.V. |
Method for depositing a group IV semiconductor and related semiconductor device structures |
| 11015245, |
Mar 19 2014 |
ASM IP Holding B.V. |
Gas-phase reactor and system having exhaust plenum and components thereof |
| 11018002, |
Jul 19 2017 |
ASM IP Holding B.V. |
Method for selectively depositing a Group IV semiconductor and related semiconductor device structures |
| 11018047, |
Jan 25 2018 |
ASM IP Holding B.V. |
Hybrid lift pin |
| 11022879, |
Nov 24 2017 |
ASM IP Holding B.V. |
Method of forming an enhanced unexposed photoresist layer |
| 11024523, |
Sep 11 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Substrate processing apparatus and method |
| 11031242, |
Nov 07 2018 |
ASM IP Holding B.V. |
Methods for depositing a boron doped silicon germanium film |
| 11047059, |
May 24 2016 |
Lam Research Corporation |
Dynamic modulation of cross flow manifold during elecroplating |
| 11049751, |
Sep 14 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Cassette supply system to store and handle cassettes and processing apparatus equipped therewith |
| 11053591, |
Aug 06 2018 |
ASM IP Holding B.V. |
Multi-port gas injection system and reactor system including same |
| 11056344, |
Aug 30 2017 |
ASM IP HOLDING B V |
Layer forming method |
| 11056567, |
May 11 2018 |
ASM IP Holding B.V. |
Method of forming a doped metal carbide film on a substrate and related semiconductor device structures |
| 11069510, |
Aug 30 2017 |
ASM IP Holding B.V. |
Substrate processing apparatus |
| 11081345, |
Feb 06 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of post-deposition treatment for silicon oxide film |
| 11087997, |
Oct 31 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Substrate processing apparatus for processing substrates |
| 11088002, |
Mar 29 2018 |
ASM IP HOLDING B V |
Substrate rack and a substrate processing system and method |
| 11094546, |
Oct 05 2017 |
ASM IP Holding B.V. |
Method for selectively depositing a metallic film on a substrate |
| 11094582, |
Jul 08 2016 |
ASM IP Holding B.V. |
Selective deposition method to form air gaps |
| 11101370, |
May 02 2016 |
ASM IP Holding B.V. |
Method of forming a germanium oxynitride film |
| 11107676, |
Jul 28 2016 |
ASM IP Holding B.V. |
Method and apparatus for filling a gap |
| 11114283, |
Mar 16 2018 |
ASM IP Holding B.V. |
Reactor, system including the reactor, and methods of manufacturing and using same |
| 11114294, |
Mar 08 2019 |
ASM IP Holding B.V. |
Structure including SiOC layer and method of forming same |
| 11127589, |
Feb 01 2019 |
ASM IP Holding B.V. |
Method of topology-selective film formation of silicon oxide |
| 11127617, |
Nov 27 2017 |
ASM IP HOLDING B V |
Storage device for storing wafer cassettes for use with a batch furnace |
| 11139191, |
Aug 09 2017 |
ASM IP HOLDING B V |
Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
| 11139308, |
Dec 29 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Atomic layer deposition of III-V compounds to form V-NAND devices |
| 11158513, |
Dec 13 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
| 11164955, |
Jul 18 2017 |
ASM IP Holding B.V. |
Methods for forming a semiconductor device structure and related semiconductor device structures |
| 11168395, |
Jun 29 2018 |
ASM IP Holding B.V. |
Temperature-controlled flange and reactor system including same |
| 11171025, |
Jan 22 2019 |
ASM IP Holding B.V. |
Substrate processing device |
| 11205585, |
Jul 28 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Substrate processing apparatus and method of operating the same |
| 11217444, |
Nov 30 2018 |
ASM IP HOLDING B V |
Method for forming an ultraviolet radiation responsive metal oxide-containing film |
| 11222772, |
Dec 14 2016 |
ASM IP Holding B.V. |
Substrate processing apparatus |
| 11227782, |
Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
| 11227789, |
Feb 20 2019 |
ASM IP Holding B.V. |
Method and apparatus for filling a recess formed within a substrate surface |
| 11230766, |
Mar 29 2018 |
ASM IP HOLDING B V |
Substrate processing apparatus and method |
| 11232963, |
Oct 03 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus and method |
| 11233133, |
Oct 21 2015 |
ASM IP Holding B.V. |
NbMC layers |
| 11242598, |
Jun 26 2015 |
ASM IP Holding B.V. |
Structures including metal carbide material, devices including the structures, and methods of forming same |
| 11244825, |
Nov 16 2018 |
ASM IP Holding B.V. |
Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
| 11251035, |
Dec 22 2016 |
ASM IP Holding B.V. |
Method of forming a structure on a substrate |
| 11251040, |
Feb 20 2019 |
ASM IP Holding B.V. |
Cyclical deposition method including treatment step and apparatus for same |
| 11251068, |
Oct 19 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus and substrate processing method |
| 11270899, |
Jun 04 2018 |
ASM IP Holding B.V. |
Wafer handling chamber with moisture reduction |
| 11274369, |
Sep 11 2018 |
ASM IP Holding B.V. |
Thin film deposition method |
| 11282698, |
Jul 19 2019 |
ASM IP Holding B.V. |
Method of forming topology-controlled amorphous carbon polymer film |
| 11286558, |
Aug 23 2019 |
ASM IP Holding B.V. |
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
| 11286562, |
Jun 08 2018 |
ASM IP Holding B.V. |
Gas-phase chemical reactor and method of using same |
| 11289326, |
May 07 2019 |
ASM IP Holding B.V. |
Method for reforming amorphous carbon polymer film |
| 11295980, |
Aug 30 2017 |
ASM IP HOLDING B V |
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
| 11296189, |
Jun 21 2018 |
ASM IP Holding B.V. |
Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
| 11306395, |
Jun 28 2017 |
ASM IP HOLDING B V |
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
| 11315794, |
Oct 21 2019 |
ASM IP Holding B.V. |
Apparatus and methods for selectively etching films |
| 11339476, |
Oct 08 2019 |
ASM IP Holding B.V. |
Substrate processing device having connection plates, substrate processing method |
| 11342216, |
Feb 20 2019 |
ASM IP Holding B.V. |
Cyclical deposition method and apparatus for filling a recess formed within a substrate surface |
| 11345999, |
Jun 06 2019 |
ASM IP Holding B.V. |
Method of using a gas-phase reactor system including analyzing exhausted gas |
| 11355338, |
May 10 2019 |
ASM IP Holding B.V. |
Method of depositing material onto a surface and structure formed according to the method |
| 11361990, |
May 28 2018 |
ASM IP Holding B.V. |
Substrate processing method and device manufactured by using the same |
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Jul 19 2017 |
ASM IP Holding B.V. |
Method for depositing a group IV semiconductor and related semiconductor device structures |
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Mar 28 2019 |
ASM IP Holding B.V. |
Door opener and substrate processing apparatus provided therewith |
| 11387106, |
Feb 14 2018 |
ASM IP Holding B.V. |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
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Sep 28 2017 |
ASM IP Holding B.V. |
Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
| 11390945, |
Jul 03 2019 |
ASM IP Holding B.V. |
Temperature control assembly for substrate processing apparatus and method of using same |
| 11390946, |
Jan 17 2019 |
ASM IP Holding B.V. |
Methods of forming a transition metal containing film on a substrate by a cyclical deposition process |
| 11390950, |
Jan 10 2017 |
ASM IP HOLDING B V |
Reactor system and method to reduce residue buildup during a film deposition process |
| 11393690, |
Jan 19 2018 |
ASM IP HOLDING B V |
Deposition method |
| 11396702, |
Nov 15 2016 |
ASM IP Holding B.V. |
Gas supply unit and substrate processing apparatus including the gas supply unit |
| 11398382, |
Mar 27 2018 |
ASM IP Holding B.V. |
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode |
| 11401605, |
Nov 26 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
| 11410851, |
Feb 15 2017 |
ASM IP Holding B.V. |
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
| 11411088, |
Nov 16 2018 |
ASM IP Holding B.V. |
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
| 11414760, |
Oct 08 2018 |
ASM IP Holding B.V. |
Substrate support unit, thin film deposition apparatus including the same, and substrate processing apparatus including the same |
| 11417545, |
Aug 08 2017 |
ASM IP Holding B.V. |
Radiation shield |
| 11424119, |
Mar 08 2019 |
ASM IP HOLDING B V |
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer |
| 11430640, |
Jul 30 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
| 11430674, |
Aug 22 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
| 11437241, |
Apr 08 2020 |
ASM IP Holding B.V. |
Apparatus and methods for selectively etching silicon oxide films |
| 11443926, |
Jul 30 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
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Dec 15 2016 |
ASM IP HOLDING B V |
Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
| 11447864, |
Apr 19 2019 |
ASM IP Holding B.V. |
Layer forming method and apparatus |
| 11453943, |
May 25 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor |
| 11453946, |
Jun 06 2019 |
ASM IP Holding B.V. |
Gas-phase reactor system including a gas detector |
| 11469098, |
May 08 2018 |
ASM IP Holding B.V. |
Methods for depositing an oxide film on a substrate by a cyclical deposition process and related device structures |
| 11473195, |
Mar 01 2018 |
ASM IP Holding B.V. |
Semiconductor processing apparatus and a method for processing a substrate |
| 11476109, |
Jun 11 2019 |
ASM IP Holding B.V. |
Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method |
| 11482412, |
Jan 19 2018 |
ASM IP HOLDING B V |
Method for depositing a gap-fill layer by plasma-assisted deposition |
| 11482418, |
Feb 20 2018 |
ASM IP Holding B.V. |
Substrate processing method and apparatus |
| 11482533, |
Feb 20 2019 |
ASM IP Holding B.V. |
Apparatus and methods for plug fill deposition in 3-D NAND applications |
| 11488819, |
Dec 04 2018 |
ASM IP Holding B.V. |
Method of cleaning substrate processing apparatus |
| 11488854, |
Mar 11 2020 |
ASM IP Holding B.V. |
Substrate handling device with adjustable joints |
| 11492703, |
Jun 27 2018 |
ASM IP HOLDING B V |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| 11495459, |
Sep 04 2019 |
ASM IP Holding B.V. |
Methods for selective deposition using a sacrificial capping layer |
| 11499222, |
Jun 27 2018 |
ASM IP HOLDING B V |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| 11499226, |
Nov 02 2018 |
ASM IP Holding B.V. |
Substrate supporting unit and a substrate processing device including the same |
| 11501956, |
Oct 12 2012 |
ASM IP Holding B.V. |
Semiconductor reaction chamber showerhead |
| 11501968, |
Nov 15 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for providing a semiconductor device with silicon filled gaps |
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Jan 16 2018 |
ASM IP Holding B.V. |
Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
| 11515187, |
May 01 2020 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Fast FOUP swapping with a FOUP handler |
| 11515188, |
May 16 2019 |
ASM IP Holding B.V. |
Wafer boat handling device, vertical batch furnace and method |
| 11521851, |
Feb 03 2020 |
ASM IP HOLDING B V |
Method of forming structures including a vanadium or indium layer |
| 11527400, |
Aug 23 2019 |
ASM IP Holding B.V. |
Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane |
| 11527403, |
Dec 19 2019 |
ASM IP Holding B.V. |
Methods for filling a gap feature on a substrate surface and related semiconductor structures |
| 11530483, |
Jun 21 2018 |
ASM IP Holding B.V. |
Substrate processing system |
| 11530876, |
Apr 24 2020 |
ASM IP Holding B.V. |
Vertical batch furnace assembly comprising a cooling gas supply |
| 11532757, |
Oct 27 2016 |
ASM IP Holding B.V. |
Deposition of charge trapping layers |
| 11551912, |
Jan 20 2020 |
ASM IP Holding B.V. |
Method of forming thin film and method of modifying surface of thin film |
| 11551925, |
Apr 01 2019 |
ASM IP Holding B.V. |
Method for manufacturing a semiconductor device |
| 11557474, |
Jul 29 2019 |
ASM IP Holding B.V. |
Methods for selective deposition utilizing n-type dopants and/or alternative dopants to achieve high dopant incorporation |
| 11562901, |
Sep 25 2019 |
ASM IP Holding B.V. |
Substrate processing method |
| 11572620, |
Nov 06 2018 |
ASM IP Holding B.V. |
Methods for selectively depositing an amorphous silicon film on a substrate |
| 11581186, |
Dec 15 2016 |
ASM IP HOLDING B V |
Sequential infiltration synthesis apparatus |
| 11581220, |
Aug 30 2017 |
ASM IP Holding B.V. |
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
| 11587814, |
Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
| 11587815, |
Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
| 11587821, |
Aug 08 2017 |
ASM IP Holding B.V. |
Substrate lift mechanism and reactor including same |
| 11594450, |
Aug 22 2019 |
ASM IP HOLDING B V |
Method for forming a structure with a hole |
| 11594600, |
Nov 05 2019 |
ASM IP Holding B.V. |
Structures with doped semiconductor layers and methods and systems for forming same |
| 11605528, |
Jul 09 2019 |
ASM IP Holding B.V. |
Plasma device using coaxial waveguide, and substrate treatment method |
| 11610774, |
Oct 02 2019 |
ASM IP Holding B.V. |
Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process |
| 11610775, |
Jul 28 2016 |
ASM IP HOLDING B V |
Method and apparatus for filling a gap |
| 11615970, |
Jul 17 2019 |
ASM IP HOLDING B V |
Radical assist ignition plasma system and method |
| 11615980, |
Feb 20 2019 |
ASM IP Holding B.V. |
Method and apparatus for filling a recess formed within a substrate surface |
| 11626308, |
May 13 2020 |
ASM IP Holding B.V. |
Laser alignment fixture for a reactor system |
| 11626316, |
Nov 20 2019 |
ASM IP Holding B.V. |
Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure |
| 11629406, |
Mar 09 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate |
| 11629407, |
Feb 22 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus and method for processing substrates |
| 11637011, |
Oct 16 2019 |
ASM IP Holding B.V. |
Method of topology-selective film formation of silicon oxide |
| 11637014, |
Oct 17 2019 |
ASM IP Holding B.V. |
Methods for selective deposition of doped semiconductor material |
| 11639548, |
Aug 21 2019 |
ASM IP Holding B.V. |
Film-forming material mixed-gas forming device and film forming device |
| 11639811, |
Nov 27 2017 |
ASM IP HOLDING B V |
Apparatus including a clean mini environment |
| 11643724, |
Jul 18 2019 |
ASM IP Holding B.V. |
Method of forming structures using a neutral beam |
| 11644758, |
Jul 17 2020 |
ASM IP Holding B.V. |
Structures and methods for use in photolithography |
| 11646184, |
Nov 29 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
| 11646197, |
Jul 03 2018 |
ASM IP Holding B.V. |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| 11646204, |
Jun 24 2020 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming a layer provided with silicon |
| 11646205, |
Oct 29 2019 |
ASM IP Holding B.V. |
Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same |
| 11649546, |
Jul 08 2016 |
ASM IP Holding B.V. |
Organic reactants for atomic layer deposition |
| 11658029, |
Dec 14 2018 |
ASM IP HOLDING B V |
Method of forming a device structure using selective deposition of gallium nitride and system for same |
| 11658030, |
Mar 29 2017 |
ASM IP Holding B.V. |
Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
| 11658035, |
Jun 30 2020 |
ASM IP HOLDING B V |
Substrate processing method |
| 11664199, |
Oct 19 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus and substrate processing method |
| 11664245, |
Jul 16 2019 |
ASM IP Holding B.V. |
Substrate processing device |
| 11664267, |
Jul 10 2019 |
ASM IP Holding B.V. |
Substrate support assembly and substrate processing device including the same |
| 11674220, |
Jul 20 2020 |
ASM IP Holding B.V. |
Method for depositing molybdenum layers using an underlayer |
| 11676812, |
Feb 19 2016 |
ASM IP Holding B.V. |
Method for forming silicon nitride film selectively on top/bottom portions |
| 11680839, |
Aug 05 2019 |
ASM IP Holding B.V. |
Liquid level sensor for a chemical source vessel |
| 11682572, |
Nov 27 2017 |
ASM IP Holdings B.V. |
Storage device for storing wafer cassettes for use with a batch furnace |
| 11685991, |
Feb 14 2018 |
ASM IP HOLDING B V ; Universiteit Gent |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
| 11688603, |
Jul 17 2019 |
ASM IP Holding B.V. |
Methods of forming silicon germanium structures |
| 11694892, |
Jul 28 2016 |
ASM IP Holding B.V. |
Method and apparatus for filling a gap |
| 11695054, |
Jul 18 2017 |
ASM IP Holding B.V. |
Methods for forming a semiconductor device structure and related semiconductor device structures |
| 11705333, |
May 21 2020 |
ASM IP Holding B.V. |
Structures including multiple carbon layers and methods of forming and using same |
| 11718913, |
Jun 04 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Gas distribution system and reactor system including same |
| 11725277, |
Jul 20 2011 |
ASM IP HOLDING B V |
Pressure transmitter for a semiconductor processing environment |
| 11725280, |
Aug 26 2020 |
ASM IP Holding B.V. |
Method for forming metal silicon oxide and metal silicon oxynitride layers |
| 11735414, |
Feb 06 2018 |
ASM IP Holding B.V. |
Method of post-deposition treatment for silicon oxide film |
| 11735422, |
Oct 10 2019 |
ASM IP HOLDING B V |
Method of forming a photoresist underlayer and structure including same |
| 11735445, |
Oct 31 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus for processing substrates |
| 11742189, |
Mar 12 2015 |
ASM IP Holding B.V. |
Multi-zone reactor, system including the reactor, and method of using the same |
| 11742198, |
Mar 08 2019 |
ASM IP Holding B.V. |
Structure including SiOCN layer and method of forming same |
| 11746414, |
Jul 03 2019 |
ASM IP Holding B.V. |
Temperature control assembly for substrate processing apparatus and method of using same |
| 11749562, |
Jul 08 2016 |
ASM IP Holding B.V. |
Selective deposition method to form air gaps |
| 11767589, |
May 29 2020 |
ASM IP Holding B.V. |
Substrate processing device |
| 11769670, |
Dec 13 2018 |
ASM IP Holding B.V. |
Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
| 11769682, |
Aug 09 2017 |
ASM IP Holding B.V. |
Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
| 11776846, |
Feb 07 2020 |
ASM IP Holding B.V. |
Methods for depositing gap filling fluids and related systems and devices |
| 11781221, |
May 07 2019 |
ASM IP Holding B.V. |
Chemical source vessel with dip tube |
| 11781243, |
Feb 17 2020 |
ASM IP Holding B.V. |
Method for depositing low temperature phosphorous-doped silicon |
| 11795545, |
Oct 07 2014 |
ASM IP Holding B.V. |
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
| 11798830, |
May 01 2020 |
ASM IP Holding B.V. |
Fast FOUP swapping with a FOUP handler |
| 11798834, |
Feb 20 2019 |
ASM IP Holding B.V. |
Cyclical deposition method and apparatus for filling a recess formed within a substrate surface |
| 11798999, |
Nov 16 2018 |
ASM IP Holding B.V. |
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
| 11802338, |
Jul 26 2017 |
ASM IP Holding B.V. |
Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
| 11804364, |
May 19 2020 |
ASM IP Holding B.V. |
Substrate processing apparatus |
| 11804388, |
Sep 11 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus and method |
| 11810788, |
Nov 01 2016 |
ASM IP Holding B.V. |
Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
| 11814715, |
Jun 27 2018 |
ASM IP Holding B.V. |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| 11814747, |
Apr 24 2019 |
ASM IP Holding B.V. |
Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribution system, and a flange assembly |
| 11821078, |
Apr 15 2020 |
ASM IP HOLDING B V |
Method for forming precoat film and method for forming silicon-containing film |
| 11823866, |
Apr 02 2020 |
ASM IP Holding B.V. |
Thin film forming method |
| 11823876, |
Sep 05 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Substrate processing apparatus |
| 11827978, |
Aug 23 2019 |
ASM IP Holding B.V. |
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
| 11827981, |
Oct 14 2020 |
ASM IP HOLDING B V |
Method of depositing material on stepped structure |
| 11828707, |
Feb 04 2020 |
ASM IP Holding B.V. |
Method and apparatus for transmittance measurements of large articles |
| 11830730, |
Aug 29 2017 |
ASM IP HOLDING B V |
Layer forming method and apparatus |
| 11830738, |
Apr 03 2020 |
ASM IP Holding B.V. |
Method for forming barrier layer and method for manufacturing semiconductor device |
| 11837483, |
Jun 04 2018 |
ASM IP Holding B.V. |
Wafer handling chamber with moisture reduction |
| 11837494, |
Mar 11 2020 |
ASM IP Holding B.V. |
Substrate handling device with adjustable joints |
| 11840761, |
Dec 04 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
| 11848200, |
May 08 2017 |
ASM IP Holding B.V. |
Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
| 11851755, |
Dec 15 2016 |
ASM IP Holding B.V. |
Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
| 11866823, |
Nov 02 2018 |
ASM IP Holding B.V. |
Substrate supporting unit and a substrate processing device including the same |
| 11873557, |
Oct 22 2020 |
ASM IP HOLDING B V |
Method of depositing vanadium metal |
| 11876008, |
Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
| 11876356, |
Mar 11 2020 |
ASM IP Holding B.V. |
Lockout tagout assembly and system and method of using same |
| 11885013, |
Dec 17 2019 |
ASM IP Holding B.V. |
Method of forming vanadium nitride layer and structure including the vanadium nitride layer |
| 11885020, |
Dec 22 2020 |
ASM IP Holding B.V. |
Transition metal deposition method |
| 11885023, |
Oct 01 2018 |
ASM IP Holding B.V. |
Substrate retaining apparatus, system including the apparatus, and method of using same |
| 11887857, |
Apr 24 2020 |
ASM IP Holding B.V. |
Methods and systems for depositing a layer comprising vanadium, nitrogen, and a further element |
| 11891696, |
Nov 30 2020 |
ASM IP Holding B.V. |
Injector configured for arrangement within a reaction chamber of a substrate processing apparatus |
| 11898242, |
Aug 23 2019 |
ASM IP Holding B.V. |
Methods for forming a polycrystalline molybdenum film over a surface of a substrate and related structures including a polycrystalline molybdenum film |
| 11898243, |
Apr 24 2020 |
ASM IP Holding B.V. |
Method of forming vanadium nitride-containing layer |
| 11901175, |
Mar 08 2019 |
ASM IP Holding B.V. |
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer |
| 11901179, |
Oct 28 2020 |
ASM IP HOLDING B V |
Method and device for depositing silicon onto substrates |
| 11908684, |
Jun 11 2019 |
ASM IP Holding B.V. |
Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method |
| 11908733, |
May 28 2018 |
ASM IP Holding B.V. |
Substrate processing method and device manufactured by using the same |
| 11915929, |
Nov 26 2019 |
ASM IP Holding B.V. |
Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface |
| 11923181, |
Nov 29 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus for minimizing the effect of a filling gas during substrate processing |
| 11923190, |
Jul 03 2018 |
ASM IP Holding B.V. |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| 11929251, |
Dec 02 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus having electrostatic chuck and substrate processing method |
| 11939673, |
Feb 23 2018 |
ASM IP Holding B.V. |
Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
| 11946137, |
Dec 16 2020 |
ASM IP HOLDING B V |
Runout and wobble measurement fixtures |
| 11952658, |
Jun 27 2018 |
ASM IP Holding B.V. |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| 11956977, |
Dec 29 2015 |
ASM IP Holding B.V. |
Atomic layer deposition of III-V compounds to form V-NAND devices |
| 11959168, |
Apr 29 2020 |
ASM IP HOLDING B V ; ASM IP Holding B.V. |
Solid source precursor vessel |
| 11959171, |
Jan 17 2019 |
ASM IP Holding B.V. |
Methods of forming a transition metal containing film on a substrate by a cyclical deposition process |
| 11961741, |
Mar 12 2020 |
ASM IP Holding B.V. |
Method for fabricating layer structure having target topological profile |
| 11967488, |
Feb 01 2013 |
ASM IP Holding B.V. |
Method for treatment of deposition reactor |
| 11970766, |
Dec 15 2016 |
ASM IP Holding B.V. |
Sequential infiltration synthesis apparatus |
| 11972944, |
Jan 19 2018 |
ASM IP Holding B.V. |
Method for depositing a gap-fill layer by plasma-assisted deposition |
| 11976359, |
Jan 06 2020 |
ASM IP Holding B.V. |
Gas supply assembly, components thereof, and reactor system including same |
| 11976361, |
Jun 28 2017 |
ASM IP Holding B.V. |
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
| 11986868, |
Feb 28 2020 |
ASM IP Holding B.V. |
System dedicated for parts cleaning |
| 11987881, |
May 22 2020 |
ASM IP Holding B.V. |
Apparatus for depositing thin films using hydrogen peroxide |
| 11993843, |
Aug 31 2017 |
ASM IP Holding B.V. |
Substrate processing apparatus |
| 11993847, |
Jan 08 2020 |
ASM IP HOLDING B V |
Injector |
| 11996289, |
Apr 16 2020 |
ASM IP HOLDING B V |
Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methods |
| 11996292, |
Oct 25 2019 |
ASM IP Holding B.V. |
Methods for filling a gap feature on a substrate surface and related semiconductor structures |
| 11996304, |
Jul 16 2019 |
ASM IP Holding B.V. |
Substrate processing device |
| 11996309, |
May 16 2019 |
ASM IP HOLDING B V ; ASM IP Holding B.V. |
Wafer boat handling device, vertical batch furnace and method |
| 12055863, |
Jul 17 2020 |
ASM IP Holding B.V. |
Structures and methods for use in photolithography |
| 12057314, |
May 15 2020 |
ASM IP Holding B.V. |
Methods for silicon germanium uniformity control using multiple precursors |
| 12074022, |
Aug 27 2020 |
ASM IP Holding B.V. |
Method and system for forming patterned structures using multiple patterning process |
| 12087586, |
Apr 15 2020 |
ASM IP HOLDING B V |
Method of forming chromium nitride layer and structure including the chromium nitride layer |
| 12106944, |
Jun 02 2020 |
ASM IP Holding B.V. |
Rotating substrate support |
| 12106965, |
Feb 15 2017 |
ASM IP Holding B.V. |
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
| 12107000, |
Jul 10 2019 |
ASM IP Holding B.V. |
Substrate support assembly and substrate processing device including the same |
| 12107005, |
Oct 06 2020 |
ASM IP Holding B.V. |
Deposition method and an apparatus for depositing a silicon-containing material |
| 12112940, |
Jul 19 2019 |
ASM IP Holding B.V. |
Method of forming topology-controlled amorphous carbon polymer film |
| 12119220, |
Dec 19 2019 |
ASM IP Holding B.V. |
Methods for filling a gap feature on a substrate surface and related semiconductor structures |
| 12119228, |
Jan 19 2018 |
ASM IP Holding B.V. |
Deposition method |
| 12125700, |
Jan 16 2020 |
ASM IP Holding B.V. |
Method of forming high aspect ratio features |
| 12129545, |
Dec 22 2020 |
ASM IP Holding B.V. |
Precursor capsule, a vessel and a method |
| 12129548, |
Jul 18 2019 |
ASM IP Holding B.V. |
Method of forming structures using a neutral beam |
| 12130084, |
Apr 24 2020 |
ASM IP Holding B.V. |
Vertical batch furnace assembly comprising a cooling gas supply |
| 12131885, |
Dec 22 2020 |
ASM IP Holding B.V. |
Plasma treatment device having matching box |
| 12148609, |
Sep 16 2020 |
ASM IP HOLDING B V |
Silicon oxide deposition method |
| 12154824, |
Aug 14 2020 |
ASM IP Holding B.V. |
Substrate processing method |
| 12159788, |
Dec 14 2020 |
ASM IP Holding B.V. |
Method of forming structures for threshold voltage control |
| 12169361, |
Jul 30 2019 |
ASM IP HOLDING B V |
Substrate processing apparatus and method |
| 12173402, |
Feb 15 2018 |
ASM IP Holding B.V. |
Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
| 12173404, |
Mar 17 2020 |
ASM IP Holding B.V. |
Method of depositing epitaxial material, structure formed using the method, and system for performing the method |
| 12176243, |
Feb 20 2019 |
ASM IP Holding B.V. |
Method and apparatus for filling a recess formed within a substrate surface |
| 8308931, |
Aug 16 2006 |
Novellus Systems, Inc |
Method and apparatus for electroplating |
| 8475636, |
Nov 07 2008 |
Novellus Systems, Inc |
Method and apparatus for electroplating |
| 8540857, |
Dec 19 2008 |
Novellus Systems, Inc. |
Plating method and apparatus with multiple internally irrigated chambers |
| 8623193, |
Jun 16 2004 |
Novellus Systems, Inc. |
Method of electroplating using a high resistance ionic current source |
| 8795480, |
Jul 02 2010 |
Novellus Systems, Inc |
Control of electrolyte hydrodynamics for efficient mass transfer during electroplating |
| 9117866, |
Jul 31 2012 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Apparatus and method for calculating a wafer position in a processing chamber under process conditions |
| 9167625, |
Nov 23 2011 |
ASM IP Holding B.V. |
Radiation shielding for a substrate holder |
| 9169975, |
Aug 28 2012 |
ASM IP Holding B.V. |
Systems and methods for mass flow controller verification |
| 9177784, |
May 07 2012 |
ASM IP Holdings B.V. |
Semiconductor device dielectric interface layer |
| 9202727, |
Mar 02 2012 |
ASM IP HOLDING B V |
Susceptor heater shim |
| 9228259, |
Feb 01 2013 |
ASM IP Holding B.V. |
Method for treatment of deposition reactor |
| 9240412, |
Sep 27 2013 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Semiconductor structure and device and methods of forming same using selective epitaxial process |
| 9299595, |
Jun 27 2012 |
ASM IP Holding B.V. |
Susceptor heater and method of heating a substrate |
| 9309604, |
Nov 07 2008 |
Novellus Systems, Inc. |
Method and apparatus for electroplating |
| 9324811, |
Sep 26 2012 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Structures and devices including a tensile-stressed silicon arsenic layer and methods of forming same |
| 9340874, |
Nov 23 2011 |
ASM IP Holding B.V. |
Chamber sealing member |
| 9341296, |
Oct 27 2011 |
ASM IP HOLDING B V |
Heater jacket for a fluid line |
| 9384987, |
Apr 04 2012 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Metal oxide protective layer for a semiconductor device |
| 9394608, |
Apr 06 2009 |
ASM IP HOLDING B V |
Semiconductor processing reactor and components thereof |
| 9394620, |
Jul 02 2010 |
Novellus Systems, Inc. |
Control of electrolyte hydrodynamics for efficient mass transfer during electroplating |
| 9396934, |
Aug 14 2013 |
ASM IP Holding B.V. |
Methods of forming films including germanium tin and structures and devices including the films |
| 9404587, |
Apr 24 2014 |
ASM IP Holding B.V |
Lockout tagout for semiconductor vacuum valve |
| 9412564, |
Jul 22 2013 |
ASM IP Holding B.V. |
Semiconductor reaction chamber with plasma capabilities |
| 9447498, |
Mar 18 2014 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for performing uniform processing in gas system-sharing multiple reaction chambers |
| 9449808, |
May 29 2013 |
Novellus Systems, Inc. |
Apparatus for advanced packaging applications |
| 9455138, |
Nov 10 2015 |
ASM IP HOLDING B V |
Method for forming dielectric film in trenches by PEALD using H-containing gas |
| 9464361, |
Jul 02 2010 |
Novellus Systems, Inc. |
Control of electrolyte hydrodynamics for efficient mass transfer during electroplating |
| 9478415, |
Feb 13 2015 |
ASM IP Holding B.V. |
Method for forming film having low resistance and shallow junction depth |
| 9484191, |
Mar 08 2013 |
ASM IP Holding B.V. |
Pulsed remote plasma method and system |
| 9523155, |
Dec 12 2012 |
Novellus Systems, Inc |
Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating |
| 9543180, |
Aug 01 2014 |
ASM IP Holding B.V. |
Apparatus and method for transporting wafers between wafer carrier and process tool under vacuum |
| 9556516, |
Oct 09 2013 |
ASM IP Holding B.V; ASM IP HOLDING B V |
Method for forming Ti-containing film by PEALD using TDMAT or TDEAT |
| 9558931, |
Jul 27 2012 |
ASM IP HOLDING B V |
System and method for gas-phase sulfur passivation of a semiconductor surface |
| 9589770, |
Mar 08 2013 |
ASM IP Holding B.V. |
Method and systems for in-situ formation of intermediate reactive species |
| 9605342, |
Sep 12 2012 |
ASM IP Holding B.V. |
Process gas management for an inductively-coupled plasma deposition reactor |
| 9605343, |
Nov 13 2013 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming conformal carbon films, structures conformal carbon film, and system of forming same |
| 9607837, |
Dec 21 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming silicon oxide cap layer for solid state diffusion process |
| 9624592, |
Jul 02 2010 |
Novellus Systems, Inc |
Cross flow manifold for electroplating apparatus |
| 9627221, |
Dec 28 2015 |
ASM IP Holding B.V. |
Continuous process incorporating atomic layer etching |
| 9640416, |
Dec 26 2012 |
ASM IP Holding B.V. |
Single-and dual-chamber module-attachable wafer-handling chamber |
| 9647114, |
Aug 14 2015 |
ASM IP Holding B.V. |
Methods of forming highly p-type doped germanium tin films and structures and devices including the films |
| 9657845, |
Oct 07 2014 |
ASM IP Holding B.V. |
Variable conductance gas distribution apparatus and method |
| 9659799, |
Aug 28 2012 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Systems and methods for dynamic semiconductor process scheduling |
| 9670588, |
May 01 2013 |
Lam Research Corporation |
Anisotropic high resistance ionic current source (AHRICS) |
| 9711345, |
Aug 25 2015 |
ASM IP HOLDING B V |
Method for forming aluminum nitride-based film by PEALD |
| 9735024, |
Dec 28 2015 |
ASM IP Holding B.V. |
Method of atomic layer etching using functional group-containing fluorocarbon |
| 9754779, |
Feb 19 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
| 9790595, |
Jul 12 2013 |
ASM IP Holding B.V. |
Method and system to reduce outgassing in a reaction chamber |
| 9793115, |
Aug 14 2013 |
ASM IP Holding B.V. |
Structures and devices including germanium-tin films and methods of forming same |
| 9793135, |
Jul 14 2016 |
ASM IP HOLDING B V |
Method of cyclic dry etching using etchant film |
| 9793148, |
Jun 22 2011 |
ASM Japan K.K. |
Method for positioning wafers in multiple wafer transport |
| 9812320, |
Jul 28 2016 |
ASM IP HOLDING B V |
Method and apparatus for filling a gap |
| 9816194, |
Mar 19 2015 |
Lam Research Corporation |
Control of electrolyte flow dynamics for uniform electroplating |
| 9834852, |
Dec 12 2012 |
Novellus Systems, Inc. |
Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating |
| 9859151, |
Jul 08 2016 |
ASM IP HOLDING B V |
Selective film deposition method to form air gaps |
| 9887082, |
Jul 28 2016 |
ASM IP HOLDING B V |
Method and apparatus for filling a gap |
| 9890456, |
Aug 21 2014 |
ASM IP Holding B.V. |
Method and system for in situ formation of gas-phase compounds |
| 9891521, |
Nov 19 2014 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for depositing thin film |
| 9892908, |
Oct 28 2011 |
ASM IP HOLDING B V |
Process feed management for semiconductor substrate processing |
| 9899230, |
May 29 2013 |
Novellus Systems, Inc. |
Apparatus for advanced packaging applications |
| 9899291, |
Jul 13 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for protecting layer by forming hydrocarbon-based extremely thin film |
| 9899405, |
Dec 22 2014 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Semiconductor device and manufacturing method thereof |
| 9905420, |
Dec 01 2015 |
ASM IP HOLDING B V |
Methods of forming silicon germanium tin films and structures and devices including the films |
| 9909214, |
Oct 15 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for depositing dielectric film in trenches by PEALD |
| 9916980, |
Dec 15 2016 |
ASM IP HOLDING B V |
Method of forming a structure on a substrate |
| 9960072, |
Sep 29 2015 |
ASM IP Holding B.V. |
Variable adjustment for precise matching of multiple chamber cavity housings |
| D587222, |
Aug 01 2006 |
Tokyo Electron Limited; SUMITOMO OSAKA CEMENT CO , LTD |
Attracting plate of an electrostatic chuck for semiconductor manufacturing |
| D614153, |
Oct 10 2007 |
ASM IP HOLDING B V |
Reactant source vessel |
| D648289, |
Oct 21 2010 |
Novellus Systems, Inc |
Electroplating flow shaping plate having offset spiral hole pattern |
| D654033, |
Jan 20 2010 |
CELADON SYSTEMS, INC |
Grooved wire support for a probe test core |
| D664249, |
Jul 01 2011 |
Applied Materials, Inc |
Flow blocker plate |
| D689032, |
Apr 21 2011 |
Panasonic Corporation |
Electrostatic atomized water particle generating module |
| D713363, |
Dec 31 2013 |
CELADON SYSTEMS, INC |
Support for a probe test core |
| D734377, |
Mar 28 2013 |
HIRATA CORPORATION |
Top cover of a load lock chamber |
| D743357, |
Mar 01 2013 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Susceptor |
| D790489, |
Jul 08 2015 |
Ebara Corporation |
Vacuum contact pad |
| D795208, |
Aug 18 2015 |
Tokyo Electron Limited |
Electrostatic chuck for semiconductor manufacturing equipment |
| D802472, |
Aug 06 2015 |
Pall Corporation |
Electrostatic chuck for semiconductor manufacturing equipment |
| D803802, |
Aug 18 2015 |
Tokyo Electron Limited |
Electrostatic chuck for semiconductor manufacturing equipment |
| D830981, |
Apr 07 2017 |
ASM IP HOLDING B V ; ASM IP Holding B.V. |
Susceptor for semiconductor substrate processing apparatus |
| D839224, |
Dec 12 2016 |
Ebara Corporation |
Elastic membrane for semiconductor wafer polishing |
| D868124, |
Dec 11 2017 |
Applied Materials, Inc |
Target profile for a physical vapor deposition chamber target |
| D868993, |
Aug 31 2017 |
HITACHI HIGH-TECH CORPORATION |
Electrode plate for a plasma processing apparatus |
| D869409, |
Sep 30 2016 |
Applied Materials, Inc. |
Target profile for a physical vapor deposition chamber target |
| D873782, |
May 17 2016 |
Electro Scientific Industries, Inc |
Component carrier plate |
| D877101, |
Mar 09 2018 |
Applied Materials, Inc |
Target profile for a physical vapor deposition chamber target |
| D880437, |
Feb 01 2018 |
ASM IP Holding B.V. |
Gas supply plate for semiconductor manufacturing apparatus |
| D894137, |
Oct 05 2017 |
Applied Materials, Inc. |
Target profile for a physical vapor deposition chamber target |
| D900036, |
Aug 24 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Heater electrical connector and adapter |
| D902165, |
Mar 09 2018 |
Applied Materials, Inc. |
Target profile for a physical vapor deposition chamber target |
| D903477, |
Jan 24 2018 |
ASM IP HOLDING B V |
Metal clamp |
| D908645, |
Aug 26 2019 |
Applied Materials, Inc |
Sputtering target for a physical vapor deposition chamber |
| D913977, |
Dec 12 2016 |
Ebara Corporation |
Elastic membrane for semiconductor wafer polishing |
| D913980, |
Feb 01 2018 |
ASM IP Holding B.V. |
Gas supply plate for semiconductor manufacturing apparatus |
| D922229, |
Jun 05 2019 |
ASM IP Holding B.V. |
Device for controlling a temperature of a gas supply unit |
| D930782, |
Aug 22 2019 |
ASM IP Holding B.V. |
Gas distributor |
| D931978, |
Jun 27 2019 |
ASM IP Holding B.V. |
Showerhead vacuum transport |
| D935572, |
May 24 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Gas channel plate |
| D937329, |
Mar 23 2020 |
Applied Materials, Inc |
Sputter target for a physical vapor deposition chamber |
| D940765, |
Dec 02 2020 |
Applied Materials, Inc |
Target profile for a physical vapor deposition chamber target |
| D940837, |
Aug 22 2019 |
ASM IP Holding B.V. |
Electrode |
| D944946, |
Jun 14 2019 |
ASM IP Holding B.V. |
Shower plate |
| D946638, |
Dec 11 2017 |
Applied Materials, Inc. |
Target profile for a physical vapor deposition chamber target |
| D947913, |
May 17 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Susceptor shaft |
| D948463, |
Oct 24 2018 |
ASM IP Holding B.V. |
Susceptor for semiconductor substrate supporting apparatus |
| D949319, |
Aug 22 2019 |
ASM IP Holding B.V. |
Exhaust duct |
| D965044, |
Aug 19 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Susceptor shaft |
| D965524, |
Aug 19 2019 |
ASM IP Holding B.V. |
Susceptor support |
| D966357, |
Dec 02 2020 |
Applied Materials, Inc. |
Target profile for a physical vapor deposition chamber target |
| D970566, |
Mar 23 2020 |
Applied Materials, Inc. |
Sputter target for a physical vapor deposition chamber |
| D975665, |
May 17 2019 |
ASM IP Holding B.V. |
Susceptor shaft |
| D979506, |
Aug 22 2019 |
ASM IP Holding B.V. |
Insulator |
| D980813, |
May 11 2021 |
ASM IP HOLDING B V |
Gas flow control plate for substrate processing apparatus |
| D980814, |
May 11 2021 |
ASM IP HOLDING B V |
Gas distributor for substrate processing apparatus |
| D981973, |
May 11 2021 |
ASM IP HOLDING B V |
Reactor wall for substrate processing apparatus |
| D984972, |
Mar 29 2021 |
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO , LTD |
Electrostatic chuck for semiconductor manufacture |
| ER1077, |
|
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| ER1413, |
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| ER1726, |
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| ER1922, |
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| ER195, |
|
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| ER2449, |
|
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| ER2608, |
|
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| ER2810, |
|
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| ER315, |
|
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| ER3883, |
|
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| ER3967, |
|
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| ER4264, |
|
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| ER4403, |
|
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| ER4489, |
|
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| ER4496, |
|
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| ER4646, |
|
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| ER4732, |
|
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| ER511, |
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| ER5378, |
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| ER6015, |
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| ER6103, |
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| ER6261, |
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| ER6328, |
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| ER6877, |
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| ER6881, |
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| ER7009, |
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| ER7365, |
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| ER7895, |
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| ER8714, |
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| ER8750, |
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| ER9386, |
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| ER9931, |
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