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Patent
D767234
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Priority
Mar 02 2015
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Filed
Mar 02 2015
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Issued
Sep 20 2016
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Expiry
Sep 20 2030
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Assg.orig
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Entity
unknown
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38
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17
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n/a
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The ornamental design for a wafer support ring, as shown and described.
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FIG. 1 is a top perspective view of a wafer support ring showing our new design;
FIG. 2 is a bottom perspective view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a front elevational view, with the rear being a mirror image thereof;
FIG. 6 is a cross sectional view taken at line 6-6 of FIG. 3; and,
FIG. 7 is a cross sectional view taken at line 7-7 of FIG. 3.
Raschke, Russ V., Steffens, Jason T., Kirkland, Eric A.
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D946638, |
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Target profile for a physical vapor deposition chamber target |
D966357, |
Dec 02 2020 |
Applied Materials, Inc. |
Target profile for a physical vapor deposition chamber target |
D970566, |
Mar 23 2020 |
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ER4840, |
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ER6877, |
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VALQUA, LTD |
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Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
Mar 02 2015 | | Entegris, Inc. | (assignment on the face of the patent) | | / |
Jun 08 2015 | RASCHKE, RUSS V | Entegris, Inc | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 036156 | /0450 |
pdf |
Jun 08 2015 | STEFFENS, JASON T | Entegris, Inc | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 036156 | /0450 |
pdf |
Jun 12 2015 | KIRKLAND, ERIC A | Entegris, Inc | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 036156 | /0450 |
pdf |
Nov 06 2018 | Entegris, Inc | Goldman Sachs Bank USA | SECURITY INTEREST SEE DOCUMENT FOR DETAILS | 048811 | /0679 |
pdf |
Nov 06 2018 | SAES PURE GAS, INC | Goldman Sachs Bank USA | SECURITY INTEREST SEE DOCUMENT FOR DETAILS | 048811 | /0679 |
pdf |
Oct 31 2019 | Goldman Sachs Bank USA | MORGAN STANLEY SENIOR FUNDING, INC | ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL FRAME 048811 0679 | 050965 | /0035 |
pdf |
Jul 06 2022 | Entegris, Inc | TRUIST BANK, AS NOTES COLLATERAL AGENT | SECURITY INTEREST SEE DOCUMENT FOR DETAILS | 060613 | /0072 |
pdf |
Jul 06 2022 | QED TECHNOLOGIES INTERNATIONAL, INC | TRUIST BANK, AS NOTES COLLATERAL AGENT | SECURITY INTEREST SEE DOCUMENT FOR DETAILS | 060613 | /0072 |
pdf |
Jul 06 2022 | INTERNATIONAL TEST SOLUTIONS, LLC | TRUIST BANK, AS NOTES COLLATERAL AGENT | SECURITY INTEREST SEE DOCUMENT FOR DETAILS | 060613 | /0072 |
pdf |
Jul 06 2022 | POCO GRAPHITE, INC | TRUIST BANK, AS NOTES COLLATERAL AGENT | SECURITY INTEREST SEE DOCUMENT FOR DETAILS | 060613 | /0072 |
pdf |
Jul 06 2022 | ENTEGRIS GP, INC | TRUIST BANK, AS NOTES COLLATERAL AGENT | SECURITY INTEREST SEE DOCUMENT FOR DETAILS | 060613 | /0072 |
pdf |
Jul 06 2022 | CMC MATERIALS, INC | TRUIST BANK, AS NOTES COLLATERAL AGENT | SECURITY INTEREST SEE DOCUMENT FOR DETAILS | 060613 | /0072 |
pdf |
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Maintenance Schedule |
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