Patent
   D591924
Priority
Oct 03 2007
Filed
Apr 02 2008
Issued
May 05 2009
Expiry
May 05 2023
Assg.orig
Entity
unknown
4
9
n/a
The ornamental design for an arm for wafer transportation for manufacturing semiconductor wafers, as shown and described.

FIG. 1 is a top view of the design for a arm for wafer transportation for manufacturing semiconductor wafers in accordance with the invention;

FIG. 2 is a bottom view thereof;

FIG. 3 is a right side view thereof;

FIG. 4 is a left side view thereof;

FIG. 5 is a front view thereof;

FIG. 6 is a rear view thereof;

FIG. 7 is a magnified, rear, sectional view between lines A—A′ of FIG. 2, along line D—D of FIG. 2; and,

FIG. 8 is a magnified, rear, sectional view between lines B—B′ of FIG. 2, along line D—D of FIG. 2.

The broken line showing in the figures is included for the purpose of illustrating environment and forms no part of the claimed design.

Abe, Takahiro

Patent Priority Assignee Title
D678046, Sep 27 2011 Masonry wall protection clip
D723239, Aug 30 2012 MORGAN STANLEY SENIOR FUNDING, INC Wafer carrier ring
D767233, Aug 30 2012 MORGAN STANLEY SENIOR FUNDING, INC Wafer carrier ring
D767234, Mar 02 2015 MORGAN STANLEY SENIOR FUNDING, INC Wafer support ring
Patent Priority Assignee Title
6116848, Nov 26 1997 Brooks Automation, Inc Apparatus and method for high-speed transfer and centering of wafer substrates
7290813, Dec 16 2004 BROOKS AUTOMATION HOLDING, LLC; Brooks Automation US, LLC Active edge grip rest pad
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D525408, Dec 17 2003 Tokyo Electron Limited Wafer conveyor arm for semiconductor manufacturing equipment
D562524, Jul 20 2004 Tokyo Electron Limited Wafer transfer apparatus
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Apr 02 2008Tokyo Electron Limited(assignment on the face of the patent)
Jun 19 2008ABE, TAKAHIROTokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0212110878 pdf
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