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Patent
D591924
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Priority
Oct 03 2007
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Filed
Apr 02 2008
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Issued
May 05 2009
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Expiry
May 05 2023
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Assg.orig
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Entity
unknown
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4
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9
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n/a
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The ornamental design for an arm for wafer transportation for manufacturing semiconductor wafers, as shown and described.
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FIG. 1 is a top view of the design for a arm for wafer transportation for manufacturing semiconductor wafers in accordance with the invention;
FIG. 2 is a bottom view thereof;
FIG. 3 is a right side view thereof;
FIG. 4 is a left side view thereof;
FIG. 5 is a front view thereof;
FIG. 6 is a rear view thereof;
FIG. 7 is a magnified, rear, sectional view between lines A—A′ of FIG. 2, along line D—D of FIG. 2; and,
FIG. 8 is a magnified, rear, sectional view between lines B—B′ of FIG. 2, along line D—D of FIG. 2.
The broken line showing in the figures is included for the purpose of illustrating environment and forms no part of the claimed design.
Abe, Takahiro
Patent |
Priority |
Assignee |
Title |
6116848, |
Nov 26 1997 |
Brooks Automation, Inc |
Apparatus and method for high-speed transfer and centering of wafer substrates |
7290813, |
Dec 16 2004 |
BROOKS AUTOMATION HOLDING, LLC; Brooks Automation US, LLC |
Active edge grip rest pad |
20030035711, |
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20040048474, |
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20060166503, |
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20060169674, |
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20060210387, |
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D525408, |
Dec 17 2003 |
Tokyo Electron Limited |
Wafer conveyor arm for semiconductor manufacturing equipment |
D562524, |
Jul 20 2004 |
Tokyo Electron Limited |
Wafer transfer apparatus |
Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a