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I claim the ornamental design for wafer conveyor arm for semiconductor manufacturing equipment, as shown and described.
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FIG. 1 is a front/top/left-side perspective view of a wafer conveyor arm for semiconductor manufacturing equipment showing my new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a top plan view thereof;
FIG. 5 is a bottom plan view thereof;
FIG. 6 is a left-side elevational view thereof; and,
FIG. 7 is a right-side elevational view thereof.
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Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
Jun 14 2004 | Tokyo Electron Limited | (assignment on the face of the patent) | / | |||
Aug 02 2004 | NITADORI, HIROMI | Tokyo Electron Limited | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 015691 | /0687 |
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