Patent
   D562524
Priority
Jul 20 2004
Filed
Jan 05 2005
Issued
Feb 19 2008
Expiry
Feb 19 2022
Assg.orig
Entity
unknown
5
17
n/a
We claim the ornamental design for a wafer transfer apparatus, as shown and described.

FIG. 1 is a top view of the wafer transfer apparatus of the present design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a back elevational view thereof;

FIG. 4 is a bottom view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a left side view thereof;

FIG. 7 is a reference figure showing a perspective view seen from a back-left hand side of the apparatus;

FIG. 8 is a reference figure showing a top view seen from a back-left hand side of the apparatus;

FIG. 9 is a reference figure showing a perspective view seen from a front-right hand side of the apparatus;

FIG. 10 is a reference figure showing a perspective view seen from a back-right hand side of the apparatus;

FIG. 11 is a reference figure showing a right side view seen from a back side of the apparatus;

FIG. 12 is a reference figure showing a perspective view seen from the back-left hand side of the apparatus;

FIG. 13 is a reference figure showing a perspective view seen from a front-right hand side of the apparatus;

FIG. 14 is a reference figure showing a perspective view seen from the front-left hand side of the apparatus;

FIG. 15 is a reference figure showing a perspective view seen from a back-left hand side of the apparatus; and,

FIG. 16 is a reference figure showing a perspective view seen from a back-right hand side of the apparatus.

The broken line showing of wafers in some of the figures is included for the purpose of illustrating environment and forms no part of the claimed design.

Shindo, Takehiro, Machiyama, Wataru, Hiroki, Tsutomu

Patent Priority Assignee Title
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Dec 15 2004HIROKI, TSUTOMUTokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0161800313 pdf
Dec 15 2004MACHIYAMA, WATARUTokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0161800313 pdf
Dec 15 2004SHINDO, TAKEHIROTokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0161800313 pdf
Jan 05 2005Tokyo Electron Limited(assignment on the face of the patent)
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