FIG. 1 is a top perspective view of a wafer support ring.
FIG. 2 is a bottom perspective view of the wafer support ring.
FIG. 3 is a top plan view of the wafer support ring.
FIG. 4 is a bottom plan view of the wafer support ring.
FIG. 5 is a front elevational view of the wafer support ring. The rear elevational view of the wafer support ring is a mirror image of the front elevational view.
FIG. 6 is a left side view of the wafer support ring. The right side view of the wafer support ring is a mirror image of the left side view.
FIG. 7 is an enlarged cross-sectional view of the wafer support ring taken along line 7-7 in FIG. 3; and,
FIG. 8 is an enlarged cross-sectional view of the wafer support ring taken along line 8-8 in FIG. 3.
Kirkland, Eric Alan
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Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
Jul 15 2019 | KIRKLAND, ERIC ALAN | Entegris, Inc | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 049765 | 0643 |
pdf |
Jul 16 2019 | | Entegris, Inc. | (assignment on the face of the patent) | | |
Jul 06 2022 | Entegris, Inc | TRUIST BANK, AS NOTES COLLATERAL AGENT | SECURITY INTEREST SEE DOCUMENT FOR DETAILS | 060613 | 0072 |
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Jul 06 2022 | ENTEGRIS GP, INC | TRUIST BANK, AS NOTES COLLATERAL AGENT | SECURITY INTEREST SEE DOCUMENT FOR DETAILS | 060613 | 0072 |
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Jul 06 2022 | POCO GRAPHITE, INC | TRUIST BANK, AS NOTES COLLATERAL AGENT | SECURITY INTEREST SEE DOCUMENT FOR DETAILS | 060613 | 0072 |
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Jul 06 2022 | CMC MATERIALS, INC | TRUIST BANK, AS NOTES COLLATERAL AGENT | SECURITY INTEREST SEE DOCUMENT FOR DETAILS | 060613 | 0072 |
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Jul 06 2022 | INTERNATIONAL TEST SOLUTIONS, LLC | TRUIST BANK, AS NOTES COLLATERAL AGENT | SECURITY INTEREST SEE DOCUMENT FOR DETAILS | 060613 | 0072 |
pdf |
Jul 06 2022 | QED TECHNOLOGIES INTERNATIONAL, INC | TRUIST BANK, AS NOTES COLLATERAL AGENT | SECURITY INTEREST SEE DOCUMENT FOR DETAILS | 060613 | 0072 |
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