Patent
   D783922
Priority
Dec 08 2014
Filed
Dec 08 2014
Issued
Apr 11 2017
Expiry
Apr 11 2031
Assg.orig
Entity
unknown
21
21
n/a
I claim the ornamental design for wafer support ring, as shown and described.

FIG. 1 is a top perspective view of a wafer support ring showing my new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a side view thereof; and,

FIG. 6 is a partial perspective cross-sectional view thereof.

Kirkland, Eric A.

Patent Priority Assignee Title
D810705, Apr 01 2016 VEECO INSTRUMENTS, INC Self-centering wafer carrier for chemical vapor deposition
D827592, Jan 31 2017 HITACHI HIGH-TECH CORPORATION Electrode cover for a plasma processing apparatus
D839224, Dec 12 2016 Ebara Corporation Elastic membrane for semiconductor wafer polishing
D840364, Jan 31 2017 HITACHI HIGH-TECH CORPORATION Electrode cover for a plasma processing apparatus
D909322, Oct 12 2018 VALQUA, LTD. Seal member for use in semiconductor production apparatus
D909323, Oct 12 2018 VALQUA, LTD. Seal member for use in semiconductor production apparatus
D913977, Dec 12 2016 Ebara Corporation Elastic membrane for semiconductor wafer polishing
D917825, Jul 16 2019 Entegris, Inc. Wafer support ring
D932721, Feb 26 2020 BWAY Corporation Container ring
D933031, Oct 12 2018 VALQUA, LTD. Seal member for semiconductor production apparatus
D933032, Oct 12 2018 VALQUA, LTD. Seal member for semiconductor production apparatus
D933033, Oct 12 2018 VALQUA, LTD. Seal member for semiconductor production apparatus
D933619, Oct 12 2018 VALQUA, LTD. Seal member for semiconductor production apparatus
D940670, Sep 26 2019 WILLBE S&T CO., LTD.; WILLBE S&T CO , LTD Retainer ring for chemical mechanical polishing device
D980394, Apr 01 2020 WATERMANN POLYWORKS GMBH Sealing apparatus
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Dec 08 2014Entegris, Inc.(assignment on the face of the patent)
May 15 2015KIRKLAND, ERIC A Entegris, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0358610198 pdf
Nov 06 2018SAES PURE GAS, INC Goldman Sachs Bank USASECURITY INTEREST SEE DOCUMENT FOR DETAILS 0488110679 pdf
Nov 06 2018Entegris, IncGoldman Sachs Bank USASECURITY INTEREST SEE DOCUMENT FOR DETAILS 0488110679 pdf
Oct 31 2019Goldman Sachs Bank USAMORGAN STANLEY SENIOR FUNDING, INC ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL FRAME 048811 06790509650035 pdf
Jul 06 2022Entegris, IncTRUIST BANK, AS NOTES COLLATERAL AGENTSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0606130072 pdf
Jul 06 2022ENTEGRIS GP, INC TRUIST BANK, AS NOTES COLLATERAL AGENTSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0606130072 pdf
Jul 06 2022CMC MATERIALS, INC TRUIST BANK, AS NOTES COLLATERAL AGENTSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0606130072 pdf
Jul 06 2022INTERNATIONAL TEST SOLUTIONS, LLCTRUIST BANK, AS NOTES COLLATERAL AGENTSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0606130072 pdf
Jul 06 2022QED TECHNOLOGIES INTERNATIONAL, INC TRUIST BANK, AS NOTES COLLATERAL AGENTSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0606130072 pdf
Jul 06 2022POCO GRAPHITE, INC TRUIST BANK, AS NOTES COLLATERAL AGENTSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0606130072 pdf
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