|
The ornamental design for a deposition ring for a substrate processing chamber, as shown and described.
|
The dashed lines in
Yoshidome, Goichi, Lavitsky, Ilya, Miller, Keith A
Patent | Priority | Assignee | Title |
11996315, | Nov 18 2020 | Applied Materials, Inc | Thin substrate handling via edge clamping |
12100613, | Dec 22 2020 | Applied Materials, Inc | Minimal contact packaging for process chamber components |
D941787, | Mar 03 2020 | Applied Materials, Inc | Substrate transfer blade |
D980813, | May 11 2021 | ASM IP HOLDING B V | Gas flow control plate for substrate processing apparatus |
D980814, | May 11 2021 | ASM IP HOLDING B V | Gas distributor for substrate processing apparatus |
D983297, | Feb 03 2021 | Ring-shaped golf alignment stick stand | |
D983915, | Feb 03 2021 | Flattened ring-shaped golf alignment stick stand | |
D984571, | Feb 03 2021 | Disc-shaped golf alignment stick stand | |
D984895, | Dec 22 2020 | Applied Materials, Inc | Packaging insert for a process chamber component |
ER1483, | |||
ER1796, | |||
ER287, | |||
ER3866, | |||
ER4782, | |||
ER6738, | |||
ER6942, | |||
ER6962, | |||
ER8226, | |||
ER915, | |||
ER980, |
Patent | Priority | Assignee | Title |
10347475, | Oct 31 2005 | Applied Materials, Inc. | Holding assembly for substrate processing chamber |
4949884, | Dec 11 1989 | WRIGHT, THEODORE O , JR | Paint can lid with drip-free pour spout |
20040074933, | |||
20080178801, | |||
20080308416, | |||
20100108500, | |||
20110209985, | |||
20120263569, | |||
20150357169, | |||
20160002788, | |||
20160189938, | |||
20170002461, | |||
20170009367, | |||
20170076924, | |||
20180087147, | |||
20180142340, | |||
20190096638, | |||
20200090915, | |||
D401252, | Jan 27 1998 | Semiconductor Equipment Technology | Shield and cover for target of sputter coating apparatus |
D403002, | Jan 27 1998 | Semiconductor Equipment Technology, Inc. | Shield and cover for target of sputter coating apparatus |
D403334, | Jan 27 1998 | Semiconductor Equipment Technology, Inc | Shield and cover for target of sputter coating apparatus |
D403337, | Aug 05 1997 | Applied Materials, Inc.; Applied Materials, Inc | High conductance low wall deposition upper shield |
D491963, | Nov 20 2002 | Tokyo Electron Limited | Inner wall shield for a process chamber for manufacturing semiconductors |
D557226, | Aug 25 2005 | HITACHI HIGH-TECH CORPORATION | Electrode cover for a plasma processing apparatus |
D559994, | Mar 30 2005 | Tokyo Electron Limited | Cover ring |
D649986, | Aug 17 2010 | Ebara Corporation | Sealing ring |
D659175, | Aug 17 2010 | Ebara Corporation | Sealing ring |
D665491, | Jan 25 2012 | Applied Materials, Inc. | Deposition chamber cover ring |
D694790, | Sep 20 2011 | Tokyo Electron Limited | Baffle plate for manufacturing semiconductor |
D709538, | Sep 30 2011 | Tokyo Electron Limited | Focusing ring |
D738451, | Nov 11 2014 | Golf ball target for chipping and putting | |
D767234, | Mar 02 2015 | MORGAN STANLEY SENIOR FUNDING, INC | Wafer support ring |
D770992, | Jun 12 2015 | HITACHI HIGH-TECH CORPORATION | Electrode cover for a plasma processing apparatus |
D797067, | Apr 21 2015 | Applied Materials, Inc | Target profile for a physical vapor deposition chamber target |
D797691, | Apr 14 2016 | Applied Materials, Inc | Composite edge ring |
D810705, | Apr 01 2016 | VEECO INSTRUMENTS, INC | Self-centering wafer carrier for chemical vapor deposition |
D819580, | Apr 01 2016 | VEECO INSTRUMENTS, INC | Self-centering wafer carrier for chemical vapor deposition |
D876504, | Apr 03 2017 | ASM IP Holding B.V.; ASM IP HOLDING B V | Exhaust flow control ring for semiconductor deposition apparatus |
D888903, | Dec 17 2018 | Applied Materials, Inc | Deposition ring for physical vapor deposition chamber |
D891382, | Feb 08 2019 | Applied Materials, Inc | Process shield for a substrate processing chamber |
JP1252261, | |||
JP1267922, | |||
JP1435220, | |||
JP1646366, | |||
KR300725455, | |||
KR300725456, | |||
KR301024426, | |||
KR301064100, | |||
TW197825, | |||
TW197827, |
Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
Mar 20 2020 | Applied Materials, Inc. | (assignment on the face of the patent) | ||||
Mar 23 2020 | LAVITSKY, ILYA | Applied Materials, Inc | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 052221 | 0862 | |
Mar 23 2020 | MILLER, KEITH A | Applied Materials, Inc | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 052221 | 0862 | |
Mar 23 2020 | YOSHIDOME, GOICHI | Applied Materials, Inc | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 052221 | 0862 |
Date | Maintenance Fee Events |
Date | Maintenance Schedule |