Exhaust flow control ring for semiconductor deposition apparatus

Exhaust flow control ring for semiconductor deposition apparatus
D876504

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Patent D876504
Priority Apr 03 2017
Filed May 15 2017
Issued Feb 25 2020
Expiry Feb 25 2035
Inventors Kim, Seung…
Assg.orig ASM IP HOL…
Assg.curr ASM IP Hol… ASM IP HOL…
Entity unknown
Referenced by 331
References 635
Maint.: n/a

The ornamental design for an exhaust flow control ring for semiconductor deposition apparatus, as shown and described.

FIG. 1 is a perspective view of an exhaust flow control ring for semiconductor deposition apparatus,

FIG. 2 is a front elevational view of the exhaust flow control ring for semiconductor deposition apparatus,

FIG. 3 is a rear elevational view of the exhaust flow control ring for semiconductor deposition apparatus,

FIG. 4 is a left side elevational view of the exhaust flow control ring for semiconductor deposition apparatus,

FIG. 5 is a right side elevational view of the exhaust flow control ring for semiconductor deposition apparatus,

FIG. 6 is another view of the exhaust flow control ring for semiconductor deposition apparatus,

FIG. 7 is another view of the exhaust flow control ring for semiconductor deposition apparatus; and,

FIG. 8 is a rear perspective view of the exhaust flow control ring for semiconductor deposition apparatus.

INVENTORS:

Kim, Seung Wook, Jung, Dong Rak, Lee, Julll, Jun, Sung Hoon

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ASSIGNMENT RECORDS Assignment records on the USPTO

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Executed on	Assignor	Assignee	Conveyance	Frame	Reel	Doc
May 11 2017	LEE, JU IL	ASM IP HOLDING B V	ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS	042385	0173	pdf
May 11 2017	JUNG, DONG RAK	ASM IP HOLDING B V	ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS	042385	0173	pdf
May 12 2017	JUN, SUNG HOON	ASM IP HOLDING B V	ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS	042385	0173	pdf
May 15 2017		ASM IP Holding B.V.	(assignment on the face of the patent)
May 15 2017	KIM, SEUNG WOOK	ASM IP HOLDING B V	ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS	042385	0173	pdf

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