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Patent
   D933725
Priority
Feb 08 2019
Filed
Feb 08 2019
Issued
Oct 19 2021
Expiry
Oct 19 2036
Inventors
Sansoni, S…
Assg.orig
Applied Ma…
Assg.curr
Applied Ma…
Entity
unknown
Referenced by
13
References
80
Maint.:
n/a
The ornamental design for a deposition ring for a substrate processing chamber, as shown and described.

FIG. 1 is an enlarged top isometric view of a deposition ring for a substrate processing chamber, according to the first embodiment of the novel design.

FIG. 2 is a top plan view thereof.

FIG. 3 is a bottom plan view thereof.

FIG. 4 is a front elevation view thereof.

FIG. 5 is a back elevation view thereof.

FIG. 6 is a left side elevation view thereof.

FIG. 7 is a right side elevation view thereof.

FIG. 8 is a cross-sectional view taken along line 8-8 in FIG. 2, enlarged for clarity.

FIG. 9 is an enlarged top isometric view of a deposition ring for a substrate processing chamber, according to the second embodiment of the novel design.

FIG. 10 is a top plan view thereof.

FIG. 11 is a bottom plan view thereof.

FIG. 12 is a front elevation view thereof.

FIG. 13 is a back elevation view thereof.

FIG. 14 is a left side elevation view thereof.

FIG. 15 is a right side elevation view thereof; and,

FIG. 16 is a cross-sectional view taken along line 16-16 in FIG. 10, enlarged for clarity.

The dashed lines in FIGS. 1-8 represent unclaimed environment forming no part of the claimed design.
INVENTORS:

Sansoni, Steven V., Koppa, Manjunatha P., Kamath, Aravind, Tsai, Cheng-Hsiung Matt, Venkataswamappa, Manjunath H., Or, David

THIS PATENT IS REFERENCED BY THESE PATENTS:
Patent Priority Assignee Title
D954986, Oct 18 2019 HITACHI HIGH-TECH CORPORATION Electrode cover for a plasma processing device
D966357, Dec 02 2020 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
D970566, Mar 23 2020 Applied Materials, Inc. Sputter target for a physical vapor deposition chamber
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D983297, Feb 03 2021 Ring-shaped golf alignment stick stand
D983915, Feb 03 2021 Flattened ring-shaped golf alignment stick stand
D984571, Feb 03 2021 Disc-shaped golf alignment stick stand
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ASSIGNMENT RECORDS    Assignment records on the USPTO
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Feb 08 2019Applied Materials, Inc.(assignment on the face of the patent)
Feb 20 2019KOPPA, MANJUNATHA P Applied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0486130705 pdf
Feb 20 2019H V, MANJUNATHApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0486130705 pdf
Feb 20 2019SANSONI, STEVEN V Applied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0486130705 pdf
Feb 20 2019OR, DAVIDApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0486130705 pdf
Feb 25 2019KAMATH, ARAVINDApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0486130705 pdf
Feb 25 2019TSAI, CHENG-HSIUNG MATTApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0486130705 pdf
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