Deposition chamber cover ring

Abstract

Description

FIG. 1 is a bottom perspective view of a deposition chamber cover ring.

FIG. 2 is a top perspective view of the deposition chamber cover ring of FIG. 1.

FIG. 3 is a bottom plan view of the deposition chamber cover ring of FIG. 1.

FIG. 4 is a top plan view of the deposition chamber cover ring of FIG. 1.

FIG. 5 is a side elevation view of the deposition chamber cover ring of FIG. 1, the other sides being identical; and,

FIG. 6 is an enlarged partial side cross-sectional view of the deposition chamber cover ring of FIG. 1 taken along section line 6-6 of FIG. 5.

The jagged line on the side of FIG. 6 is utilized to show where the enlarged view is broken away from the remainder of the deposition chamber cover ring of FIG. 5. The jagged line forms no part of the claimed design.

Claims

The ornamental design for a deposition chamber cover ring, as shown and described.