Patent
   D381030
Priority
Nov 21 1995
Filed
Nov 21 1995
Issued
Jul 15 1997
Expiry
Jul 15 2011
Assg.orig
Entity
unknown
25
3
n/a
The ornamental design for a sputtering target, as shown and described.

FIG. 1 is a perspective view showing substantially the top of a sputtering target of the present invention;

FIG. 2 is a perspective view showing substantially the bottom of a sputtering target of the present invention;

FIG. 3 is a top view of a sputtering target of the present invention;

FIG. 4 is a side view of a sputtering target of the present invention;

FIG. 5 is a bottom view of a sputtering target of the present invention; and,

FIG. 6 is a cross-sectional view of a sputtering target of the present invention.

Tepman, Avi

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ER6877,
Patent Priority Assignee Title
5460708, Nov 30 1990 Texas Instruments Incorporated Semiconductor processing system
5480530, Mar 09 1993 Leybold Aktiengesellschaft Mask for covering the margin of a disk-shaped substrate
5529673, Feb 17 1995 PRAXAIR S T TECHNOLOGY, INC Mechanically joined sputtering target and adapter therefor
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Mar 20 1996TEPMAN, AVIApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0081310227 pdf
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