Patent
   D529057
Priority
Aug 16 2004
Filed
Aug 16 2004
Issued
Sep 26 2006
Expiry
Sep 26 2020
Assg.orig
Entity
unknown
6
5
n/a
The ornamental design for a sputtering target, as shown and described.

FIG. 1 is a top plan view of the design.

FIG. 2 is a cross-sectional view of the upper portion of the design taken at line 2—2 of FIG. 1.

FIG. 3 is an enlarged detail of the cross-sectional view shown in FIG. 2.

FIG. 4 is a partial top plan view of the design shown in FIG. 1; and,

FIG. 5 is a cross-sectional view taken at line 5—5 of FIG. 4.

Willson, Matthew T., Grohman, Henry L.

Patent Priority Assignee Title
D643055, Sep 11 2008 ASM Japan K.K. Heater block for use in a semiconductor processing tool
D799646, Aug 30 2016 ASM IP Holding B.V.; ASM IP HOLDING B V Heater block
D859484, Jun 12 2017 ASM IP Holding B.V.; ASM IP HOLDING B V Heater block
D873782, May 17 2016 Electro Scientific Industries, Inc Component carrier plate
D927575, Jan 18 2019 Shinkawa Ltd Heater block for bonding apparatus
D959525, Jan 18 2019 SHINKAWA LTD. Heater block for bonding apparatus
Patent Priority Assignee Title
3821841,
6471830, Oct 03 2000 VEECO-CVC, INC Inductively-coupled-plasma ionized physical-vapor deposition apparatus, method and system
6599399, Mar 07 1997 Applied Materials, Inc Sputtering method to generate ionized metal plasma using electron beams and magnetic field
6623605, Dec 06 2001 Applied Materials, Inc. Method and apparatus for fabricating a wafer spacing mask on a substrate support chuck
D381030, Nov 21 1995 Applied Materials, Inc Sputtering target
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Aug 16 2004Williams Advanced Materials, Inc.(assignment on the face of the patent)
Aug 16 2004WILSON, MATTHEW T WILLIAMS ADVANCED MATERIALS, INC ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0152440532 pdf
Aug 16 2004GROHMAN, HENRY L WILLIAMS ADVANCED MATERIALS, INC ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0152440532 pdf
Mar 16 2011WILLAMS ADVANCED MATERIALS INC MATERION ADVANCED MATERIALS TECHNOLOGIES AND SERVICES INC CHANGE OF NAME SEE DOCUMENT FOR DETAILS 0260080584 pdf
Jun 20 2013MATERION ADVANCED MATERIALS TECHNOLOGIES AND SERVICES INC JPMORGAN CHASE BANK, N A , AS ADMINISTRATIVE AGENTSECURITY AGREEMENT0306670402 pdf
Sep 24 2019MATERION ADVANCED MATERIALS TECHNOLOGIES AND SERVICES INC JPMORGAN CHASE BANK, N A , AS ADMINISTRATIVE AGENTSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0504910066 pdf
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