Cover for a heater stage of a plasma processing apparatus

Abstract

Description

FIG. 1 is a front view of a cover for a heater stage of a plasma processing apparatus showing my new design:

FIG. 2 is a rear view thereof;

FIG. 3 is a right side view thereof;

FIG. 4 is a top plan view thereof;

FIG. 5 is a sectional view taken along line 5—5 of FIG. 1 thereof;

FIG. 6 is an enlarged view taken along line 6—6 of FIG. 5 thereof,

FIG. 7 is an enlarged view taken along line 7—7 of FIG. 5 thereof; and,

FIG. 8 is a perspective view thereof.

Claims

The ornamental design for a cover for a heater stage of a plasma processing apparatus, as shown.