Patent
   D570310
Priority
Aug 01 2006
Filed
Feb 01 2007
Issued
Jun 03 2008
Expiry
Jun 03 2022
Assg.orig
Entity
unknown
19
9
n/a
The ornamental design for an attracting plate of an electrostatic chuck for semiconductor manufacturing, as shown and described.

FIG. 1 is a front elevational view of an attracting plate of an electrostatic chuck for semiconductor manufacturing, or the like, showing my new design;

FIG. 2 is a rear elevational view thereof;

FIG. 3 is a top plan view thereof, the bottom plan view being a mirror image of the plan view shown;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof; and,

FIG. 6 is a bottom, rear and lower perspective view thereof.

The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.

Sasaki, Yasuharu

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Patent Priority Assignee Title
5671116, Mar 10 1995 Lam Research Corporation Multilayered electrostatic chuck and method of manufacture thereof
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//
Executed onAssignorAssigneeConveyanceFrameReelDoc
Feb 01 2007Tokyo Electron Limited(assignment on the face of the patent)
Feb 16 2007SASAKI, YASUHARUTokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0190900649 pdf
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