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Patent
D570310
Priority
Aug 01 2006
Filed
Feb 01 2007
Issued
Jun 03 2008
Expiry
Jun 03 2022
Assg.orig
Entity
unknown
19
9
n/a
The ornamental design for an attracting plate of an electrostatic chuck for semiconductor manufacturing, as shown and described.
FIG. 1 is a front elevational view of an attracting plate of an electrostatic chuck for semiconductor manufacturing, or the like, showing my new design;
FIG. 2 is a rear elevational view thereof;
FIG. 3 is a top plan view thereof, the bottom plan view being a mirror image of the plan view shown;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a left side elevational view thereof; and,
FIG. 6 is a bottom, rear and lower perspective view thereof.
The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.
Sasaki, Yasuharu
Patent
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Title
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Patent
Priority
Assignee
Title
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Lam Research Corporation
Multilayered electrostatic chuck and method of manufacture thereof
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Electrostatic chuck with improved temperature control and puncture resistance
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Date
Maintenance Fee Events
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Date
Maintenance Schedule
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