Patent
   D548200
Priority
Sep 29 2005
Filed
Dec 19 2005
Issued
Aug 07 2007
Expiry
Aug 07 2021
Assg.orig
Entity
unknown
9
18
n/a
The ornamental design for an attracting disc for an electrostatic chuck for semiconductor production, as shown and described.

FIG. 1 is a front elevational view of an attracting disc for an electrostatic chuck for semiconductor production, showing my new design;

FIG. 2 is a rear elevational view thereof;

FIG. 3 is a left side elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a top plan view thereof; and,

FIG. 6 is a bottom plan view thereof.

The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.

Hayashi, Daisuke

Patent Priority Assignee Title
D570310, Aug 01 2006 Tokyo Electron Limited Attracting plate of an electrostatic chuck for semiconductor manufacturing
D587222, Aug 01 2006 Tokyo Electron Limited; SUMITOMO OSAKA CEMENT CO , LTD Attracting plate of an electrostatic chuck for semiconductor manufacturing
D689032, Apr 21 2011 Panasonic Corporation Electrostatic atomized water particle generating module
D795208, Aug 18 2015 Tokyo Electron Limited Electrostatic chuck for semiconductor manufacturing equipment
D802472, Aug 06 2015 Pall Corporation Electrostatic chuck for semiconductor manufacturing equipment
D803802, Aug 18 2015 Tokyo Electron Limited Electrostatic chuck for semiconductor manufacturing equipment
D913256, Jul 31 2019 Antenna pattern for a semiconductive substrate carrier
D926716, Jul 31 2019 Antenna pattern for a semiconductive substrate carrier
D984972, Mar 29 2021 BEIJING NAURA MICROELECTRONICS EQUIPMENT CO , LTD Electrostatic chuck for semiconductor manufacture
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Dec 19 2005Tokyo Electron Limited(assignment on the face of the patent)
Mar 22 2006HAYASHI, DAISUKETokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0177680567 pdf
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